Micro actuators

Reynaerts D, Peirs J, Van Brussel H. An implantable drag-delivery system based on shape memory alloy micro-actuation. Sens Actuators 1997 A61 455-462. 

The swelling behaviour of smart hydrogels makes them very attractive for (micro-) actuator and sensor applications. One key point in the employment of smart... 

Maitland, D.J., Metzger, M.F., Schumann, D., Lee, A., Wilson, T.S., April 17—April 22, 2001. Photothermal properties of shape memory polymer micro-actuators for treating stroke. In Conference American Society for Laser Medicine and Simgeiy 21st Annual Meeting, New Orleans, LA. 

In order to fuUy exploit the scalability of DE actuators, it necessary to be able to pattern electrodes on the micro scale as well. Rosset el al have explored the use of ion implanted metal electrodes in PDMS [221-224]. Their results show that conductivity can be maintained for strains up to 175% and can remain conductive over 10 cycles at 30% strain. This is of particular importance for MEMS microfluidic devices where the DE micro-actuators could be used as micro-pumps. The ion-implanted films maintained high breakdown fields (>100 MV m ) while the Young s modulus increased by 50-200% depending on the dose. 

Buguin A, Li MH, Silberzan P, Ladoux B, Keller P. 2006. Micro actuators when artificial muscles made of nematic liquid crystal elastomers meet soft lithography. J Am Chem Soc 128 1088 1089. 

Kucharski TJ, Boulatov R (2012) In Knopf GK (ed) Optical nano and micro actuator technology. CRC, Boca Raton, pp 83-106. Chap. 3... 

The anisotropic wet etching of silicon is a unique fabrication process in the MEMS field. The need to develop new processes to fabricate functional 3D microstructures in various materials is urgent for progress in microfluidic systems, microsensors, micro-actuators, and microinstrumentation. At present, to integrate surface micromachined devices and standard IC devices with bulk micromachined structures to demonstrate a new functional MEMS application is still a challenge for researchers who work in this field. The cooperation of multidisciplinary researchers will be required to develop miniature systems with the most appropriate building philosophy and the best operation performance. 

Hsu CP, Hsu WY (2000) A two-way membrane-type micro-actuator with continuous deflections. J Micromech Microeng 10 387-394... 

Yamada, K., Y. Kume, and H. Tabe. 1998. A solid-state electrochemical device using poly(pyrrole) as micro-actuator. Japanese J Appl Phys Part 1 -Regular Papers Short Notes Review Papers 37 5798-5799. 

Piezcelectrics Acoustic transducers, wave guides, nonlinear optics, micro-actuators PbZrOg, PbTiOg, LiNbOg... 

The artificial hand developed at Germany s Aachen University of Technology uses pneumatic micro-actuators for finger movement. Audio-Animatronics, the form of robotics used by Walt Disney Imagineering, uses pneumatics in Disney theme park shows and rides such as Pirates of the Caribbean. 

Hamberg, M.W. Neagu, C. Gardeniers, J.G.E. Ijntema, D.J. and Elwen-spoek, M. An Electrochemical Micro Actuator. Proc. MEMS 95, Amsterdam, The Netherlands (1995)... 

A different aspect of micro-actuators is their synthesis as freely suspended objects in a fluid environment. The advantage of this concept is that it allows simultaneous application of many actuators with identical size and shape. If the micro-objects are aligned via self-assembly, their sheer number can create strong deformation forces. 

Ataka, M., Fujita, H. and Mita, M. (2010) 2D Planar Micro Manipulator by Stack-Integrated Micro Actuator/Sensor Array , First Workshop on Hardware and Software Implementation and Control of Distributed MEMS (DMEMS), Besan, TBD, France. 

Ataka, M., Mita, M. and Fujita, H. (2007a) Multi-Object Conveyance By Peripherally Controlled Micro Actuator/... 

Bohringer, K.R, Suh, J.F., Donald, B.R. and Kovacs, G.T.A. (1997) Vector fields for task-level distributed manipulation experiments with organic micro-actuator arrays . In IEEE International Conference on Robotics and Automation (ICRA), Albuquerque, New Mexico 1779-86. 

Buguin, A., Li, M.-H., Silberzan, P., et al. (2006) Micro-Actuators When Artificial Muscles Made of Nematic Liquid Crystal Elastomers Meet Soft Lithography, J. Am. Chem. Soc., 128, 1088-9. 

Scale down the microelectromechanical systems (MEMS) industry offers tremendous opportunities for novel actuators and ICPs are well suited to meet these needs, as reviewed recentiy [76]. Fabrication, design and control issues need to be refined to develop useful micro-actuator devices. 

Tajitsu, Y., Kawai, S., Kanasaki, M., et al., (2004) Micro-actuators with Piezoelectric Polylactic Acid Fibers, Ferroelectrics, 304, 195-200. 

Shahinpoor, M. Design and Development of Micro-Actuators Using Ionic Polymeric Micro-Muscles, , Proc. ASME Design Engn. Technical Conference, Boston, MA, September (1995)... 

While a bubble expands or contracts in a liquid, mechanical work is transferred between the bubble and the surrounding liquid. The kinetic energy transferred from the expanding vapor microlayer on a thin-film heater surface could be used, in principle, to drive electromechanical microdevices such as micro actuators and micro pumps. The useful work converted from the thermal energy on the surface of a microheater is critical for these applications. The mechanical work, Em, done by a vapor volume expansion on the surrounding liquid is [16]... 

Gebhard U, Hein H, Just E, Ruther P (1997) Combination of a fluidic micro-oscillator and micro-actuator in LIGA-technique for medical application. In Solid-State Sensors and Actuators (Transducers 97), pp 761-764... 

Silicon micromachining concerns a process that involves the removal of silicon materials using wet chemical or dry plasma process in order to create 3-D silicon or nonsilicon microstructures for making functional devices such as micro-sensors, micro-actuators, biochips, etc. 

The efficacy of these micro actuators for micro fluidics... 

Ikuta, K., H. Fujita, S. Arimoto, M. Ikeda, and S. Yamashita. 1990. Development of Micro Actuator Using Shape Memory Alloy Thin Film. Pp. 3-6 in Proceedings of the IEEE International Workshop on Intelligent Robots and Systems 90 Towards a New Frontier of Applications. New York IEEE. 

---