Micro-hotplate sensor

T.A. Kunt, T.J. McAvoy, R.E. Cavicchi, and S. Semancik. Optimization of temperature programmed sensing for gas identification using micro-hotplate sensors . Sensors and Actuators B53 (1998), 24-43. 

J.S. Suehle, R.E. Cavicchi, M. Gaitan, and S. Semancik. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing , IEEE Electron Device Letters 14 (1993), 118-120. 

D. Briand, A. Krauss, B. van der School, U. Weimar, N. Barsan, W. Gopel, and N.F. de Rooij. Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors . Sensors and Actuators B68 (2000), 223-233. 

F. Udrea, J.W. Gardner, D. Setiadi, J.A. Covington, T. Dogaru, C.C. Lua, and W.l. MUne. Design and simulations of SOl-CMOS micro-hotplate gas sensors . Sensors and Actua-torsB78 (2001), 180-190. 

R.E. Cavicchi, J.S. Suehle, K.G. Kreider, M. Gaitan, and P. Chaparala. Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensors , Sensors and Actuators B33 (1996), 142-146. 

J. HUdenbrand, J. Wdllenstein, E. SpiUer, G. Kuhner, H. Bottner, G. Urban, and J.G. Kor-vink. Design and fabrication of a novel low cost hotplate micro gas sensor . Proceeding of the SPIE (The International Society for Optical Engineering) 4755 (2002), 191-199. 

S. Muller. CMOS-Micro-Hotplate with MOS Transistor Heater for Integrated Metal Oxide Gas Sensors, Diploma thesis, ETH Zurich, Switzerland (2002). 

Optimize micro-hotplate based H2 sensor design and fabrication processes... 

Llohet, E., Brezmes, J., lonescu, R., Vilanova, X., Al-Khahfa, S., Gardner, J.W., Barsan, N., Correig, X. Wavelet transform and fuzzy ARTMAP-hased pattern recognition for fast gas identification using a micro-hotplate gas sensor. Sens. Acmators B 83, 238-244 (2002) MaUat, S. A theory for multiresolution signal decomposition the wavelet representation. IEEE Trans. Pattern Anal. Mach. Intell. 11, 674-693 (1989)... 

It then addresses the micro-hotplates concept that has led to the development of different types of micromachined gas sensor devices. The different reahzations of micromachined semiconductor gas sensors are presented thin- and thick-film metal-oxide, field effect, and those using complementary metal-oxide semiconductors (CMOSs) and silicon-on-insulator (SOI) technologies. Finally, recent developments based on gas sensitive nanostructures, polymers, printing and foil-based technologies are highlighted. 

Key words silicon micromachining, micro-hotplates, semiconductor, metal-oxide, field-effect, gas sensors, CMOS and SOI, nanowires, printing, polymeric, plastic. 

Briand, D., Tomassone, G.-M. and de Rooij, N. F. (2003) Accelerated ageing of micro-hotplates for gas sensing appheations , in Proceedings of IEEE Sensors 2003 conference,Tor onto, Canada, 1314-17. 

Cavicchi, R. E., Snehle, J. S., Kreider, K. Q, Gaitan, M. and Chaparala, P. (1995), Fast temperatnre programmed sensing for micro-hotplate gas sensors , IEEE Electron Device Lett., 16(6), 286-8. 

Ivanov, R, Stankova, M., Llobet, E., Vilanova, X., Brezmes, J., Gracia, I., Cane, C., Calderer, J. and Correig, X. (2005), Nanoparticle metal-oxide films for micro-hotplate-based gas sensor systems ,/ Sens. 5(5), 798-809. 

New-generation micro-resistive sensors are usually formed on a thin thermally-insulated silicon membrane so as to reduce the power loss this thin membrane-like structure is often referred to as a micro-hotplate . Researchers have studied different materials for designing micro-heaters, such as doped polysilicon, aluminium and platinum (Cavicchi et al, 1995 Houlet et al, 2006 Udrea et al, 2001). Platinum heaters are probably the most stable material at 400°C, but this material is not available in a CMOS foundry hence, post-CMOS deposition is necessary. Within the CMOS... 

Multiple micro-hotplate-based gas sensors on a single silicon die (Cambridge CMOS Sensors, UK). 

Barrettino, D., Graf M., Zitmnermann, M., Hierlemann, A., Baltes, H., Hahn, S., Barsan, N. and Weimar, U. (2002) A smart single-chip micro-hotplate-based chemical sensor system in CMOS-technology. International Symposium on Circuits and Systems, 2,157-160. 

Houlet, L. F.,Tajima, K., Shin, W, Itoh,T., Izu, N. and Matsubara, I. (2006) Platinum micro-hotplates on thermal insulated structure for micro-thermoelectric gas sensor. lEEJ Transactions on Sensors and Micromachines, 126,568-572. 

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