Scanning electron microscope/microscopy

Electron Beam Techniques. One of the most powerful tools in VLSI technology is the scanning electron microscope (sem) (see Microscopy). A sem is typically used in three modes secondary electron detection, back-scattered electron detection, and x-ray fluorescence (xrf). AH three techniques can be used for nondestmctive analysis of a VLSI wafer, where the sample does not have to be destroyed for sample preparation or by analysis, if the sem is equipped to accept large wafer-sized samples and the electron beam is used at low (ca 1 keV) energy to preserve the functional integrity of the circuitry. Samples that do not diffuse the charge produced by the electron beam, such as insulators, require special sample preparation. 

Microscopy is an unusual scientific discipline, involving as it does a wide variety of microscopes and techniques. All have in common the abiUty to image and enlarge tiny objects to macroscopic size for study, comparison, evaluation, and identification. Few industries or research laboratories can afford to ignore microscopy, although each may use only a small fraction of the various types. Microscopy review articles appear every two years m. Jinalytical Chemistty (1,2). Whereas the style of the Enclyclopedia employs lower case abbreviations for analytical techniques and instmments, eg, sem for scanning electron microscope, in this article capital letters will be used, eg, SEM. 

Boggs, J.L. Prentice, K.J. Kraeutle J.E. Crump, The Role of the Scanning Electron Microscope in the Study of Solid Propellant Combustion , inavwepsceiiu ir h/zo yiyoy) do) u,u, Graber, F.C. Rauch A.J. Fanelli, Observation of Solid-Solid Polymorphic Transformation in 2,4,6-Trinitro Toluene , JPhChem 73, (10), 3514—15 (1969) 39) J.E. Crump, J.L. Prentice K.J. Kraeutle Role of Scanning Electron Microscopy in the Study of Solid Propellant Combustion. Part 11—Behavior of Metal Additives , NavWepsCentr TP-5142-PT-2 (1969) 40) J.A. Markham A.R. Cox, Applications... 

Morphology SEM scanning electron microscopy JEOL scanning electron microscope... 

Nitrogen adsorption isotherms were measured with a sorbtometer Micromeretics Asap 2010 after water desorption at 130°C. The distribution of pore radius was obtained from the adsorption isotherms by the density functional theory. Electron microscopy study was carried out with a scanning electron microscope (SEM) HitachiS800, to image the texture of the fibers and with a transmission electron microscope (TEM) JEOL 2010 to detect and measure metal particle size. The distribution of particles inside the carbon fibers was determined from TEM views taken through ultramicrotome sections across the carbon fiber. 

Scanning electron microscopy is commonly used to study the particle morphology of pharmaceutical materials. Its use is somewhat limited because the information obtained is visual and descriptive, but usually not quantitative. When the scanning electron microscope is used in conjunction with other techniques, however, it becomes a powerful characterization tool for pharmaceutical materials. 

Electron microscopy easily yields structural images of cast bilayer films. Figure 6 shows a scanning electron microscope (SEM) image of the cross section of the bilayer film of CgAzoCioN+Br prepared by the simple casting of water solution. From the presence of well developed layers parallel to die film plane, it can be assumed that the cast film was composed from multiple highly oriented bilayers. 

Tanaka K, Mitsushima A, Kashima Y, Osatake H. A new high resolution scanning electron microscope and its application to biological materials, in Proc Eleventh Inti Cong Electron Microsc, vol III (Imura T, Maruse S, Suzuki T, eds.), Publication Committee of the Xlth International Congress on Electron Microscopy, Kyoto, lapan, 1986, pp. 2097-2100. 

Field emission devices, 17 49-50 Field emission FPDs (FEDs), 22 259 Field emission microscope (FEM), 16 503 Field emission microscopy (FEM), 24 74 Field emission scanning electron microscope (FESEM), 16 492 Field emission scanning electron... 

Model 467), x-ray powder diffracton (Philips XRG-3000, x-ray diffractometer, CuK radiation Ni filter), and scanning electron microscopy, SEM (ISI scanning electron microscope, Model II). Infrared spectra and powder diffraction data were in agreement with the published values for apatite (19,20). Chemical analysis of the solid gave a molar ratio of Ca/P = 1.64 +0.01 the SSA was 21.5 m g"1. 

FIGURE 11.66 Summary of size ranges covered by various analytical techniques for atmospheric aerosols. TEM, transmission electron microscopy SEM, scanning electron microscope (adapted from Hinds, 1982). 

Electron microscopy is an efficient microscopy technique that has been extensively used for the material characterization of artistic and archaeological objects, especially in combination with x-ray microanalysis [54], The use of electrons instead of light in these instruments is the basis of the higher resolution ( 9-0.2 nm) and has greater depth of held than LM. Thus, characterization of the finest topography of the surface objects is possible, and additional analytical information can be obtained. Different electron microscopes are currently used in art and art conservation studies scanning electron microscopes (SEM), Cryo-SEM... 

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