Electron scanning

SEM Scanning electron microscopy [7, 10, 14] A beam of electrons scattered from a surface is focused Surface morphology... 

R. E. Lee, Scanning Electron Microscopy and X-Ray Microanalysis, PTR Prentice Hall, Englewood Cliffs, NJ, 1993. 

P. R. Thornton, Scanning Electron Microscopy, Chapman and Hall, 1968. See also Scanning Electron Microscopy Systems and Applications, The Institute of Physics, London, 1973. 

ESEM environmental scanning electron microscope ESI electron spectroscopic imaging... 

LVSEM low-voltage scanning electron microscope MTF modulation transfer function... 

Reimer L 1998 Scanning Electron Microscopy (Berlin Springer)... 

Zach J 1989 Design of a high-resolution low-voltage scanning electron microscope Opf/k 83 30-40... 

Boyde A 1970 Practicai probiems and methods in the three-dimensionai anaiysis of SEM images Scanning Electron Microsc. 105 112... 

Light microscope Scanning electron microscope Transmission electron microscope Scanning probe microscope... 

Figure C2.11.2. A scanning electron micrograph showing individual particles in a poly crystalline alumina powder.

Figure C2.11.3. A scanning electron micrograph of tire spherical alumina granules produced by spray drying a ceramic slurry. The granules are comprised of individual alumina particles, sintering additives, and an organic binder.

Figure C2.11.5. Scanning electron micrographs showing the microstmcture of an alumina ceramic spark-plug body (a) fracture surface and (b) polished and thennally etched cross section.

Figure C2.17.3. Close-packed array of sub-micrometre silica nanoparticles. Wlren nanoparticles are very monodisperse, they will spontaneously arrange into hexagonal close-packed stmcture. This scanning electron micrograph shows an example of this for very monodisperse silica nanoparticles of -250 nm diameter, prepared in a thin-film fonnat following the teclmiques outlined in [236].

Otlier fonns of microscopy have been used to evaluate nanocrystals. Scanning electron microscopy (SEM), while having lower resolution tlian TEM, is able to image nanoparticles on bulk surfaces, for direct visualization of... 

Fig. 4. Scanning electron micrograph of 5-p.m diameter Zn powder. Neck formation from localized melting is caused by high-velocity interparticle coUisions. Similar micrographs and elemental composition maps (by Auger electron spectroscopy) of mixed metal coUisions have also been made.

Fig. 10. Scanning electron micrograph of amorphous nanostmctured iron powder produced from the ultrasonic irradiation of Fe(CO). ...

Fig. 12. Scanning electron micrograph of sonochemicaUy synthesized hemoglobin microspheres.

A scanning electron microscope can also be equipped with additional instmmentation for electron-excited x-ray analysis (9). In many systems, this is performed in the mode known as energy dispersive x-ray analysis (edx). Other common acronyms for this method are eds for energy dispersive spectroscopy or edax for energy dispersive analysis of x-rays. 

Fig. 13. Scanning electron microscope (sem) photographs of Parylene C-coated printed circuit conductor peeled to demonstrate the adhesion of the...

Additional information on elastomer and SAN microstmcture is provided by C-nmr analysis (100). Rubber particle composition may be inferred from glass-transition data provided by thermal or mechanochemical analysis. Rubber particle morphology as obtained by transmission or scanning electron microscopy (101) is indicative of the ABS manufacturing process (77). (See Figs. 1 and 2.)... 

Fig. 2. Scanning electron photomicrograph of a polyester nonwoven fabric.

Physical testing appHcations and methods for fibrous materials are reviewed in the Hterature (101—103) and are generally appHcable to polyester fibers. Microscopic analyses by optical or scanning electron microscopy are useful for evaluating fiber parameters including size, shape, uniformity, and surface characteristics. Computerized image analysis is often used to quantify and evaluate these parameters for quaUty control. 

The very high powers of magnification afforded by the electron microscope, either scanning electron microscopy (sem) or scanning transmission electron microscopy (stem), are used for identification of items such as wood species, in technological studies of ancient metals or ceramics, and especially in the study of deterioration processes taking place in various types of art objects. 

Fig. 11. Scanning electron micrograph showing the intersection of primary shear bands with the glassy ribbon surface produced by simple bending.

Scanning electron beam systems are available commercially, and are commonly used for mask generation. Electron projection systems are also used to obtain resolution over a large field. Current cathode sources have a short lifetime, limiting use in production processes. 

Electron Beam Techniques. One of the most powerful tools in VLSI technology is the scanning electron microscope (sem) (see Microscopy). A sem is typically used in three modes secondary electron detection, back-scattered electron detection, and x-ray fluorescence (xrf). AH three techniques can be used for nondestmctive analysis of a VLSI wafer, where the sample does not have to be destroyed for sample preparation or by analysis, if the sem is equipped to accept large wafer-sized samples and the electron beam is used at low (ca 1 keV) energy to preserve the functional integrity of the circuitry. Samples that do not diffuse the charge produced by the electron beam, such as insulators, require special sample preparation. 

Particle Size. Wet sieve analyses are commonly used in the 20 )J.m (using microsieves) to 150 )J.m size range. Sizes in the 1—10 )J.m range are analyzed by light-transmission Hquid-phase sedimentation, laser beam diffraction, or potentiometric variation methods. Electron microscopy is the only rehable procedure for characterizing submicrometer particles. Scanning electron microscopy is useful for characterizing particle shape, and the relation of particle shape to slurry stabiUty. 

Fig. 5. (a) Preparation method and (b) scanning electron micrograph of a typical expanded polypropylene film membrane, ia this case Celgard. 

---