Optical emission spectroscopy atomic fluorescence spectrometry

The most frequently applied analytical methods used for characterizing bulk and layered systems (wafers and layers for microelectronics see the example in the schematic on the right-hand side) are summarized in Figure 9.4. Besides mass spectrometric techniques there are a multitude of alternative powerful analytical techniques for characterizing such multi-layered systems. The analytical methods used for determining trace and ultratrace elements in, for example, high purity materials for microelectronic applications include AAS (atomic absorption spectrometry), XRF (X-ray fluorescence analysis), ICP-OES (optical emission spectroscopy with inductively coupled plasma), NAA (neutron activation analysis) and others. For the characterization of layered systems or for the determination of surface contamination, XPS (X-ray photon electron spectroscopy), SEM-EDX (secondary electron microscopy combined with energy disperse X-ray analysis) and... 

Since the mid-1960s, a variety of analytical chemistry techniques have been used to characterize obsidian sources and artifacts for provenance research (4, 32-36). The most common of these methods include optical emission spectroscopy (OES), atomic absorption spectroscopy (AAS), particle-induced X-ray emission spectroscopy (PIXE), inductively coupled plasma-mass spectrometry (ICP-MS), laser ablation-inductively coupled plasma mass spectrometry (LA-ICP-MS), X-ray fluorescence spectroscopy (XRF), and neutron activation analysis (NAA). When selecting a method of analysis for obsidian, one must consider accuracy, precision, cost, promptness of results, existence of comparative data, and availability. Most of the above-mentioned techniques are capable of determining a number of elements, but some of the methods are more labor-intensive, more destructive, and less precise than others. The two methods with the longest and most successful histoty of success for obsidian provenance research are XRF and NAA. 

In both total and sequential dissolutions, the result is a solution containing the components of rocks and soils. This solution is then analyzed by different methods. Mostly, spectroscopic methods are used atomic absorption and emission spectroscopic methods, ultraviolet, atom fluorescence, and x-ray fluorescence spectrometry. Multielement methods (e.g., inductively coupled plasma optical emission spectroscopy) obviously have some advantages. Moreover, elec-troanalytical methods, ion-selective electrodes, and neutron activation analysis can also be applied. Spectroscopic methods can also be combined with mass spectrometry. 

Tt may be safe to say that the interest of environmental scientists in airborne metals closely parallels our ability to measure these components. Before the advent of atomic absorption spectroscopy, the metal content of environmental samples was analyzed predominantly by wet or classical chemical methods and by optical emission spectroscopy in the larger analytical laboratories. Since the introduction of atomic absorption techniques in the late 1950s and the increased application of x-ray fluorescence analysis, airborne metals have been more easily and more accurately characterized at trace levels than previously possible by the older techniques. These analytical methods along with other modem techniques such as spark source mass spectrometry and activation analysis... 

Heated vaporization atomic absorption Mass spectrometry (direct injection) Neutron activation Optical emission spectroscopy X-ray fluorescence (ion exchange)... 

ESCA electron spectroscopy for chemical analysis (X-ray photoelectron spectroscopy) ESI electrospray ionization ET-AAS (Also denoted GFAAS, EAAS, EA-AAS, ETAAS, ETA-AAS) electrothermal atomization atomic absorption spectrometry ETA-CFS electrothermal atomization -coherent forward scattering (atomic magneto-optic rotation) spectrometry ETAES electrothermal atomization atomic emission spectrometry ETAES electrothermal atomization atomic fluorescence spectrometry ETA-LEI electrothermal atomization -laser enhanced ionization spectrometry... 

Various techniques can be used for quantitative analysis of chemical composition, including (i) optical atomic spectroscopy (atomic absorption, atomic emission, and atomic fluorescence), (ii) X-ray fluorescence spectroscopy, (iii) mass spectrometry, (iv) electrochemistry, and (v) nuclear and radioisotope analysis [41]. Among these, optical atomic spectroscopy, involving atomic absorption (AA) or atomic emission (AE), has been the most widely used for chemical analysis of ceramic powders. It can be used to determine the contents of both major and minor elements, as well as trace elements, because of its high precision and low detection limits. 

This requirement is met for almost all the important elements by the use of optical emission spectroscopy and X-ray fluorescence spectrometry (XRFS). XRFS is applicable to all elements with an atomic number greater than 12. Using these two techniques, all metals and non-metals down to an atomic number of 15 (phosphorus) can be determined in polymers at tbe required concentrations [1-4]. 

Numerous methods have been pubUshed for the determination of trace amounts of tellurium (33—42). Instmmental analytical methods (qv) used to determine trace amounts of tellurium include atomic absorption spectrometry, flame, graphite furnace, and hydride generation inductively coupled argon plasma optical emission spectrometry inductively coupled plasma mass spectrometry neutron activation analysis and spectrophotometry (see Mass spectrometry Spectroscopy, optical). Other instmmental methods include polarography, potentiometry, emission spectroscopy, x-ray diffraction, and x-ray fluorescence. 

GD-OES (glow discharge optical emission spectrometry) are applied. AES (auger electron spectroscopy), AFM (atomic force microscopy) and TRXF (transmission reflection X-ray fluorescence analysis) have been successfully used, especially in the semiconductor industry and in materials research. 

Several spectroscopic methods have been used to monitor the levels of heavy metals in man, fossil fuels and environment. They include flame atomic absorption spectrometry (AAS), atomic emission spectroscopy (AES), graphite furnace atomic absorption sp>ectrometry (GFAAS), inductively coupled plasma-atomic emission sp>ectroscopy (ICP/AES), inductively coupled plasma mass spectrometry (ICP/MS), x-ray fluorescence sp>ectroscopy (XRFS), isotope dilution mass spectrometry (IDMS), electrothermal atomic absorption spectrometry (ETAAS) e.t.c. Also other spectroscopic methods have been used for analysis of the quality composition of the alternative fuels such as biodiesel. These include Nuclear magnetic resonance spectroscopy (NMR), Near infrared spectroscopy (NIR), inductively coupled plasma optical emission spectrometry (ICP-OES) e.t.c. 

See also Activation Analysis Neutron Activation. Atomic Emission Spectrometry Inductively Coupled Plasma. Atomic Mass Spectrometry Inductively Coupled Plasma. Chemometrics and Statistics Expert Systems. Glasses. Microscopy Applications Forensic. Optical Spectroscopy Refractometry and Reflectometry. X-Ray Fluorescence and Emission Energy Dispersive X-Ray Fluorescence. 

Inductively coupled plasma-atomic emission spectrometry allows the determination of anionic surfactants (LAS and AS) and inorganic compounds (phosphate, silicate, zeolite, sulfate). Other techniques, such as X-ray fluorescence spectroscopy and X-ray powder diffraction, have been used for the qualitative analysis of inorganic detergents. For surface analysis, optical light microscopy, scanning electron microscopy, and transmission electron microscopy characterize particles, deposition of surfactant, or other detergent ingredients on fabric. 

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