Novel pads

Doy T, Seshimo K, Suzuki K, Philipossian A, Kinoshita M. Impact of novel pad groove designs on removal rate and uniformity of dielectric and copper CMP. J Electrochem Soc 2004 151(3) G196-G199. 

High Performance Textiles andTheir Applications Table 6.5 Novel padding bandages... 

The Magic Carpet system (AstroTurf Industries) (13) is a novel installation technique in which turf and adherent underpad are unwound from a core and floated onto the subbase of a playing field by air pressure suppHed from ducts in the base. To expose the subbase for other sports uses, the turf—pad combination is roUed up and stored at the edge of the field or in a recessed storage compartment. 

A tetracarboxylated derivative was prepared recently by reaction of a commercial reactive dye with two molar equivalents of aspartic acid. This novel derivative was evaluated by pad-dry-bake and pad-batch-bake methods under slightly acidic conditions in the presence of cyanamide as activator [49]. An interesting disperse dye containing a novel reactive anhydride system (7.54) was prepared from the parent dye carboxylate (7.53) by reaction with ethyl chloroformate in the presence of a tertiary base (Scheme 7.32). Such dyes will... 

The novel cationic reactant 2,4 dichloro-6 (2, pyridinoethylamino) S triazine (7.128) was evaluated as a means of activating cellulose by pad-batch application at pH 8.5 for 24 hours. This agent contains two reactive chlorine atoms but under these mild conditions only... 

A. Inamdar, M. A. Fury, D. Towery, A. B. Stubbman, J. W. Zimmer, Cost of Ownership Implications of a Novel CMP Pad Conditioning Device, Third International Chemical-Mechanical Polish (CMP) for VLSI Multilevel Interconnection Conference, pp. 169-171, Feb. 19-20, 1998. 

In a novel experiment, Ip et al. (1999) demonstrated that rats fed a RA-enriched butter had reduced mammary epithelial mass, decreased size of the TEB population, suppressed proliferation of TEB cells, and inhibition of mammary tumor incidence and tumor number similar to animals fed an equivalent quantity of mixed CLA isomers. There was a consistently higher level of RA in the liver, mammary fat pad, peritoneal fat, and blood plasma of rats fed RA-enriched butter compared to CLA-fed rats. The elevated RA levels resulted, no doubt, from endogenous A9-desaturation of VA, which was concurrently increased in the RA-enriched butter. 

Gitis et al. [21] demonstrated the effectiveness of a novel noninvasive instrument called PadProbe , developed by CETR Inc., in monitoring pad surface quality and pad life. PadProbe can be installed on rotational, orbital, and linear type CMP polishers (refer to Fig. 4.10). This sensor can monitor pad surface friction and wear in situ during the conditioning process. The only requirement is that the sensor should be in direct contact with the pad surface. 

Kulawski M, Henttinen K, Suni I, Weimar F, Makinen J. A novel CMP process on fixed abrasive pads for the manufacturing of highly planar thick film SOI substrates. Mater Res Soc Symp Proc 2003 767 F2.11.1-F2.11.6. 

Deopura M, Hwang E, Misra S, Roy PK. Stress characterization of post-CMP copper films planarized using novel low-shear and surface-engineered pads. Mater Res Soc Symp Proc 2005 867 W2.7.1-W2.7.12. 

FIGURE 11.26 Novel carbon pad with fabricated electrocells for ECMP (from Ref 33). 

Kondo S, Tominaga S, Namiki A, Yamada K, Abe D, Fukaya K, Shimada M, Kobayashi N. Novel electrochemical-mechanical planarization using carbon polishing pad to achieve robust ultra-low-fe/Cu integration IITC. Jun 2005. 

The book PIHKAL (Phenethylamines I Have Known And Loved), A Chemical Love Story, is unusual in that it combines under one cover, an auto-biographical novel about a love triangle, and 30 years of scientific laboratory notes. The entire package weighs in at a hefty 978 pages, and is not padded. The unusual presentation is a reflection of the subject matter the chemistry of the human mind and the methodology of its exploration. 

Phaneuf et al. have developed a novel biomaterial surface that provides both localised infection resistance and haemostatic properties. Functional groups were created with woven Dacron material through exposure to ethylenediamine (C-EDA) and the antibiotic ciprofloxacin was then applied to the C-EDA using the pad/autoclave technique followed by surface immobilisation of the coagulation cascade enzyme thrombin. It was found that the antimicrobial activity of the treated fabric surface persisted for 5 days compared with the untreated fabric. Thrombin surfaces had 2.6-and 105-fold greater surface thrombin activity compared with non-specifically bound thrombin and ciprofloxacin-dyed surfaces, respectively. This study demonstrated that ciprofloxacin and thrombin can be simultaneously incorporated onto a biomaterial surface while maintaining their respective biological activities (Phaneuf et al., 2005). 

In 1996, Wacker-Chemie-GmbH Co. Ltd in Germany developed an active CD, and immobilized it to the cellulose by dipping and padding. This kind of novel CD could be applied to modify not only the cellulose, starch, gelatin and other natural polymer materials, but also the polyester, polyamide, polypropylene and other synthetic fibers. Therefore, they could be used in different functional materials if treated appropriately. For example, a kind of fiber-CDPs encapsulated squalane was developed in Japan. Despite repeated washing, encapsulated squalane was able to maintain the moisturizing capabilities. 

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