Integrated circuits thin films

Industrial Amlications Dye laser photoresists liquid crystals semiconductor integrated circuits thin films recording materials inks toners photographic materials ... 

Molybdenum hexafluoride is used in the manufacture of thin films (qv) for large-scale integrated circuits (qv) commonly known as LSIC systems (3,4), in the manufacture of metallised ceramics (see MetaL-MATRIX COMPOSITES) (5), and chemical vapor deposition of molybdenum and molybdenum—tungsten alloys (see Molybdenumand molybdenum alloys) (6,7). The latter process involves the reduction of gaseous metal fluorides by hydrogen at elevated temperatures to produce metals or their alloys such as molybdenum—tungsten, molybdenum—tungsten—rhenium, or molybdenum—rhenium alloys. 

Deposition of Thin Films. Laser photochemical deposition has been extensively studied, especially with respect to fabrication of microelectronic stmctures (see Integrated circuits). This procedure could be used in integrated circuit fabrication for the direct generation of patterns. Laser-aided chemical vapor deposition, which can be used to deposit layers of semiconductors, metals, and insulators, could define the circuit features. The deposits can have dimensions in the micrometer regime and they can be produced in specific patterns. Laser chemical vapor deposition can use either of two approaches. 

There is great interest in the use of thin-film platinum siHcide in siHcon-integrated circuit technology. Platinum siHcide has low resistance and high... 

The 10 volumes in the Series on characterization of particular materials classes include volumes on silicon processir, metals and alloys, catalytic materials, integrated circuit packaging, etc. Characterization is approached from the materials user s point of view. Thus, in general, the format is based on properties, processing steps, materials classification, etc., rather than on a technique. The emphasis of all volumes is on surfaces, interfaces, and thin films, but the emphasis varies depending on the relative importance of these areas for the materials class concerned. Appendixes in each volume reproduce the relevant one-page summaries from the Encyclopedia and provide longer summaries for any techniques referred to that are not covered in the Encyclopedia. 

Developing better processes for deposition and coating of thin films. An integrated circuit, in essence, is a series of electrically coimected thin films. Thin films are the key stractural feature of recording media and optical fibers, as well. 

The significance of corrosion protection has risen sharply in recent years for a number of reasons (1) because of efforts to reduce the metal content of parts (e.g., by using thinner metallic support structures) (2) with the use of new types of equipment and processes involving expensive equipment operated under extreme conditions, such as nuclear reactors and jet and rocket engines and (3) in connection with the development of products having extremely thin metal films, such as printed circuit boards and integrated circuits. 

Kolesar ES, Brothers CP, Howe CP, et al. 1992. Integrated-circuit microsensor for selectively detecting nitrogen-dioxide and diisopropyl methylphosphonate. Thin Solid Films 220(1-2) 30-37. 

The rolled type batteries are general-purpose batteries with high capacity and good characteristics. Thin film power sources have found a number of specific applications in the fields of portable accumulators with high energy density for application in electronic and integral circuits, sensors, monitors and for medicine [3],... 

Manufacture of Printed Wiring Boards. Printed wiring boards, or printed circuit boards, are usually thin flat panels than contain one or multiple layers of thin copper patterns that interconnect the various electronic components (e.g. integrated circuit chips, connectors, resistors) that are attached to the boards. These panels are present in almost every consumer electronic product and automobile sold today. The various photopolymer products used to manufacture the printed wiring boards include film resists, electroless plating resists (23), liquid resists, electrodeposited resists (24), solder masks (25), laser exposed photoresists (26), flexible photoimageable permanent coatings (27) and polyimide interlayer insulator films (28). Another new use of photopolymer chemistry is the selective formation of conductive patterns in polymers (29). 

The irradiation of polymers is widespread in many industries. For example, microlithography is an essential process in the fabrication of integrated circuits that involves the modification of the solubility or volatility of thin polymer resist films by radiation. The sterilization by radiation of medical and pharmaceutical items, many of which are manufactured from polymeric materials, is increasing. This trend arises from both the convenience of the process and the concern about the toxicity of chemical sterilants. Information about the radiolysis products of natural and synthetic polymers used in the medical industry is required for the evaluation of the safety of the process. 

Another role for polymer film and surfaces in the world to come is already firmly founded in the notion of modern thin film and integrated electronic circuitry. The era of solid state electronics determines nowadays our use of automata and other elements of highest productivity in international economy, as well being increasing factors in science, eduction, and national security. These capabilities are now primarily embodied in micro circuits, whose integrated form is made directly on single crystal surfaces of silicon or similar semiconductor. 

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