Deposition furnace

Apart from the reactions described above for the formation of thin films of metals and compounds by the use of a solid source of the material, a very important industrial application of vapour phase transport involves the preparation of gas mixtures at room temperature which are then submitted to thermal decomposition in a high temperature furnace to produce a thin film at this temperature. Many of the molecular species and reactions which were considered earlier are used in this procedure, and so the conclusions which were drawn regarding choice and optimal performance apply again. For example, instead of using a solid source to prepare refractory compounds, as in the case of silicon carbide discussed above, a similar reaction has been used to prepare titanium boride coatings on silicon carbide and hafnium diboride coatings on carbon by means of a gaseous input to the deposition furnace (Choy and Derby, 1993) (Shinavski and Diefendorf, 1993). 

The liquid source is usually maintained near room temperature, and an inert gas is bubbled through the source. A commonly used source for doping Si is BBrj, which needs a small percentage of O2 in the carrier gas to form B2O3 on the Si surface. Diffusion without O2 blackens the Si In the high temperature deposition furnace ... 

Pickering MA, Goela JS, Bums LE (1995) Chemical vapour deposition furnace and furnace apparatuss. US Patent 5,474,613... 

Table VIII. Deposit Furnace Mass and Relative Build-Up Rates for Keystone Coal at a Furnace Temperature of 1500°C at Two Different Substrate Surface Temperatures (Deposition Zone Gas Temperature,...

The stability of the properties of polysilicon films to processing is not ideal. The structure and intrinsic stress of LPCVD-poly films created by different organizations but with the same deposition recipe were different [21]. The properties of LPCVD-poly can differ even on wafers from the same deposition run, due to small temperature fluctuations in the deposition furnace [25]. However, since several LPCVD-poly surface-micromachined sensors are in fact produced in high volumes for the automotive industry (e.g., by Analog Devices, Infineon, and Motorola), these literature data may not represent the current state of the art. 

Pure stoichiometric ZnO is heated to 1400 K in an evacuated chamber of a vapor deposition furnace. What is the partial pressure of Zn and O2 generated by the thermal decomposition of ZnO Information you may find useful AC no at 1400K = -183 kJ/mol. 

Figure.l Temperature distributions of field A and field B in deposition furnace... 

Equipment for microfabrication, (a) Electron beam evaporator, (b) Sputterer. (c) Low pressure chemical vapor deposition furnace, (d) Stepjper for photolithography, (e) Reactive ion etching, (f) Wafer bonder. 

The common ore of tin is tinstone or cassiterite. Sn02, found in Cornwall and in Germany and other countries. The price of tin has risen so sharply in recent years that previously disregarded deposits in Cornwall are now being re-examined. Tin is obtained from the tin dioxide, Sn02, by reducing it with coal in a reverbatory furnace ... 

The complete assembly for carrying out the catalytic decomposition of acids into ketones is shown in Fig. Ill, 72, 1. The main part of the apparatus consists of a device for dropping the acid at constant rate into a combustion tube containing the catalyst (manganous oxide deposited upon pumice) and heated electrically to about 350° the reaction products are condensed by a double surface condenser and coUected in a flask (which may be cooled in ice, if necessary) a glass bubbler at the end of the apparatus indicates the rate of decomposition (evolution of carbon dioxide). The furnace may be a commercial cylindrical furnace, about 70 cm. in length, but it is excellent practice, and certainly very much cheaper, to construct it from simple materials. 

Orga.nic Carbon. Organic materials interfere with plant operation because these compounds react with sulfuric acid under furnace conditions to form sulfur dioxide. There is a reducing atmosphere in the furnace which may reduce sulfur dioxide to elemental sulfur, which results in sulfur deposits in the gas handling system. 

Total Sulfur and Sulfide Sulfur. Total sulfur is predominately in the form of metal sulfate, and because sulfates act as inerts, these materials have htde impact on the process. Sulfide sulfur compounds, on the other hand, react and leave the furnace as a sulfur vapor, which may deposit in the gas handling system. A possible mechanism for this is the partial reaction of SO2 to H2S, followed by... 

High process temperatures generally not achievable by other means are possible when induction heating of a graphite susceptor is combined with the use of low conductivity high temperature insulation such as flake carbon interposed between the coil and the susceptor. Temperatures of 3000°C are routine for both batch or continuous production. Processes include purification, graphitization, chemical vapor deposition, or carbon vapor deposition to produce components for the aircraft and defense industry. Figure 7 illustrates a furnace suitable for the production of aerospace brake components in a batch operation. 

The tiansition from a choice of multiple fossil fuels to various ranks of coal, with the subbituminous varieties a common choice, does in effect entail a fuel-dependent size aspect in furnace design. A controlling factor of furnace design is the ash content and composition of the coal. If wall deposition thereof (slagging) is not properly allowed for or controlled, the furnace may not perform as predicted. Furnace size varies with the ash content and composition of the coals used. The ash composition for various coals of industrial importance is shown in Table 3. 

Naphtha desulfurization is conducted in the vapor phase as described for natural gas. Raw naphtha is preheated and vaporized in a separate furnace. If the sulfur content of the naphtha is very high, after Co—Mo hydrotreating, the naphtha is condensed, H2S is stripped out, and the residual H2S is adsorbed on ZnO. The primary reformer operates at conditions similar to those used with natural gas feed. The nickel catalyst, however, requires a promoter such as potassium in order to avoid carbon deposition at the practical levels of steam-to-carbon ratios of 3.5—5.0. Deposition of carbon from hydrocarbons cracking on the particles of the catalyst reduces the activity of the catalyst for the reforming and results in local uneven heating of the reformer tubes because the firing heat is not removed by the reforming reaction. 

In the United States, the first ironworks was built at Jamestown, Virginia, in 1619. The Hammersmith furnace in Saugus, Massachusetts, built in 1645, operated until 1675. This early American ironworks has been restored and is called the Saugus Iron Works. Iron blast furnaces appeared in many locahties where there were deposits of iron ore. Small bodies of iron ore in New Jersey, Connecticut, Massachusetts, Pennsylvania, and New York formed the basis of many small colonial furnaces. 

The Utah deposit is located in southwestern Utah near Cedar City. The iron ore deposits are of contact metamorphic origin. The cmde ore contains 35 to 65% iron, primarily in the form of magnetite and goethite. Mining is done by the open pit method. The cmde ore is cmshed, screened at —75 mm (—200 mesh size) and shipped as lump ore containing 54% iron. The ore is rescreened at the steel mill to produce lump ore (10—64 mm) for the blast furnace and sinter feed (0—10 mm) for the sinter plant. 

Electrometallurgy. A term covering the various electrical processes for the working of metals, eg, electro deposition, electrorefining and electro winning, and operations in electric furnaces. 

The cracked products leave as overhead materials, and coke deposits form on the inner surface of the dmm. To provide continuous operation, two dmms are used while one dmm is on-stream, the one off-stream is being cleaned, steamed, water-cooled, and decoked in the same time interval. The temperature in the coke dmm is in the range of 415—450°C with pressures in the range of 103—621 kPa (15—90 psi). Overhead products go to the fractionator, where naphtha and heating oil fractions are recovered. The nonvolatile material is combined with preheated fresh feed and returned to the furnace. The coke dmm is usually on stream for about 24 hours before becoming filled with porous coke, after which the coke is removed hydraulically. 

Carbide. Zirconium carbide [12020-14-3] nominally ZrC, is a dark gray brittle soHd. It is made typically by a carbothermic reduction of zirconium oxide in a induction-heated vacuum furnace. Alternative production methods, especially for deposition on a substrate, consist of vapor-phase reaction of a volatile zirconium haHde, usually ZrCl, with a hydrocarbon in a hydrogen atmosphere at 900—1400°C. 

---