Gas handling system

Figure A3.10.12 Side view of die high-pressure eell showing die eomieedons to the UHV ehamber, the turbomoleeular pump and the gas handling system. The differentially pumped sliding seal is loeated between the high-pressure eell and the UHV ehamber [37],...

Orga.nic Carbon. Organic materials interfere with plant operation because these compounds react with sulfuric acid under furnace conditions to form sulfur dioxide. There is a reducing atmosphere in the furnace which may reduce sulfur dioxide to elemental sulfur, which results in sulfur deposits in the gas handling system. 

Total Sulfur and Sulfide Sulfur. Total sulfur is predominately in the form of metal sulfate, and because sulfates act as inerts, these materials have htde impact on the process. Sulfide sulfur compounds, on the other hand, react and leave the furnace as a sulfur vapor, which may deposit in the gas handling system. A possible mechanism for this is the partial reaction of SO2 to H2S, followed by... 

Vapors from Hquids can be put into the gas stream by bubbling the hydrogen or a carrier gas through the Hquid or by using a hot surface to vaporize the Hquid into the gas stream. Liquid precursors are generally metered onto a hot surface using a peristaltic pump and the gas handling system is kept hot to... 

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