Chemical vapor deposition, process for

Wang HB, Meng GY, and Peng DK. Aerosol and plasma assisted chemical vapor deposition process for multi-component oxide La08Sr02MnO3 thin film. Thin Solid Films 2000 368 275-278. 

Certain numerical algorithms can benefit from the equation in a form that has the dependent variable Ft directly in the diffusive terms on the right-hand side. Moreover, for flows that have relatively small mean-molecular-weight gradients, the second term may be negligible. Examples of this situation would be if there is an inert carrier gas that dominates the species composition. It is not unusual in chemical-vapor-deposition processes for... 

One sign of progress is the extent to which sophisticated research on transport phenomena, particularly mass transfer, has penetrated several other fields, including those described in later papers of this volume. Examples include fundamental work on the mechanics of trickle beds [17] within reactor engineering studies of dispersion in laminar flows [18] in the context of separations important to biotechnology coupling between fluid flows and mass transfer in chemical vapor deposition processes for fabrication of semiconductor devices [19] and optical fiber preforms [20] and the simulation of flows in mixers, extruders, and other unit operations for processing polymers. 

Kuo,T.-F., et al. (2001), Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes,/. Vac. Sci. Technol. Microelectron. Nanometer Struct., 19(3), 1030-1033. 

VaporFab - nickel coated carbon fiber by a chemical vapor deposition process for EMI shielding applications... 

Kannan, A. M., Kanagala, R, and Veedu, V. 2009. Development of carbon nanotubes based gas diffusion layers by in situ chemical vapor deposition process for proton exchange membrane fuel cells. Journal of Power Sources 192 297-303. 

P. Serp, R. Feurer, P. Kalek, Y. Kihn, J. L. Faria, and J. L. Figueiredo, A chemical vapor deposition process for the production of carbon nanospheres. Carbon, 39, 621-626, 2001. 

Lee, C., Park, J. - Growth and structure of carbon nanotubes produced by thermal chemical vapor deposition . Carbon 39 (2001) 1891-1896 Grujicic, M., Cao, G., Gersten, B. - Optimization of chemical vapor deposition process for carbon nanotubes fabrication , Appl. Surface Sci. 191 (2002) 223-239 Bonard, J., Stora, T., Salvetat, J., Maier, F., Stockli, T., Duschl, C., Forr6, L., Heer, W., Chatelain, A. - Purification and size selection of carbon nanotubes , Adv. Mater. 9(10) (1997) 827... 

In chemical vapor deposition processing, the principal source of residual stress is from a coefficient of expansion mismatch. One of the principal criteria for CVD processing is the matching of the coefficient of expansions of the film and substrate, which limits the possible film—substrate combinations that can be used. 

Tertiary stibines have been widely employed as ligands in a variety of transition metal complexes (99), and they appear to have numerous uses in synthetic organic chemistry (66), eg, for the olefination of carbonyl compounds (100). They have also been used for the formation of semiconductors by the metal—organic chemical vapor deposition process (101), as catalysts or cocatalysts for a number of polymerization reactions (102), as ingredients of light-sensitive substances (103), and for many other industrial purposes. 

Diamonds also occur in meteorites, probably as a result of high pressures produced dynamically by impact (10,11). The shock or explosive mode of synthesis is a viable process for fine diamond powders of both the cubic and hexagonal (lonsdaleite) polymorphs (12) naturally or otherwise. Some diamonds in space appear to have formed by processes more closely related to the low pressure chemical vapor deposition processes described later (see... 

Naimpally, A., A Study of the Annealing Processes for Doped Glasses Deposited by the Chemical Vapor Deposition Process, Y4MPE J., pp. 24-5 (Sept/Oct 1988)... 

Chemical vapor deposition processes are complex. Chemical thermodynamics, mass transfer, reaction kinetics and crystal growth all play important roles. Equilibrium thermodynamic analysis is the first step in understanding any CVD process. Thermodynamic calculations are useful in predicting limiting deposition rates and condensed phases in the systems which can deposit under the limiting equilibrium state. These calculations are made for CVD of titanium - - and tantalum diborides, but in dynamic CVD systems equilibrium is rarely achieved and kinetic factors often govern the deposition rate behavior. 

Fig, 1. A modified vapor deposition process for the production of fiber optic rods. (From National Research Council Frontiers in Chemical Engineering, 1988). 

The rotating disk is a configuration that was first identified and analyzed by Von Karman [418], and studied extensively for its similarity reduction of the Navier-Stokes equations [65,374], It was later recognized for its value in chemical vapor deposition processes... 

L.L. Raja, R.J. Kee, R. Serban, and L.R. Petzold. A Computational Algorithm for Dynamic Optimization of Chemical Vapor Deposition Processes in Stagnation Flow Reactors. J. Electrochem. Soc., 147 2718-2726,2000. 

Interest in the fundamental processes involved in formation of amorphous Ge-containing compounds by chemical vapor deposition processes assisted by radiolysis has been responsible for a number of studies dedicated to the reactions of Ge ions with O2, NH3, PH3, SiFLj and simple alkanes and alkenes131,145-150. 

The chemical vapor deposition processes obtained from the laser induced multiphoton decomposition of neat organogermanes or sensitized by SFg have also been characterized for several systems. For example, the decomposition of Ge(OMe)4 leads to the formation of organoxogermanium polymers, while EtOGeMcs leads to materials rich in Ge and containing small amounts of oxygen and carbon. In the latter case, two primary processes have been proposed to be responsible for the chain reactions leading to the final products (equations 40a and 40b)... 

---