Transparent conducting oxide film

W. Beyer, J. Hiipkes, H. Stiebig, Transparent conducting oxide films for thin film silicon photovoltaics. to be published at ICMCTF, San Diego (2007)... 

Fig. 6.1 A design for a tandem photoelectrolysis system that uses nanostmctured semiconductor films of opposite cairier type that are deposited on opposite sides of a single substrate that is covered on both sides with a continuous transparent conducting oxide film. The larger bandgap material is transparent to the lower energy radiation that is absorbed by the smaller gap film on the backside of the substrate...

Jarzebski, Z.M (1982). Preparation and physical properties of transparent conducting oxide films. Phys. Stat. Sol., VoL 71 (a), pp.13-41. 

Minami, T., Sato, H., Nanto, H., Takata, S. (1989). Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnCh and indium tin oxide. Thin Solid Films, Vol. 176, pp. 277-282. 

Y. Leterrier, L. Medico, F. Demarco, J. A. E. Manson, M. Escola Figuera, M. Kharazzi Olson and U. Betz, Mechanical Integrity of Transparent Conductive Oxide Film for Flexible Polymer based Displays, submitted to Thin Solid Films. 

Figure 4 shows the basic constmetion of the devices used in different appHcations, involving the deposition of multilayers of i -SiH of intrinsic (/), doped ), and closely aUied films, such as amorphous siHcon nitride, SiN, and transparent conducting oxide (TCO). As in crystalline... 

Successful electrodeposition of Sb2To3 has been reported for the first time by Leimkiihler et al. [229] who prepared polycrystalline thin films of the material on different transparent conductive oxides, as well as CdTe and Mo, from uncomplexed solutions made by mixing stock solutions of SbCb, Te02, and phthalate buffer (pH 4). The electrochemical process was discussed in detail based on results obtained by cyclic voltammetry on ITO/glass. The bath temperature was found to influence... 

Figure 9.7. Illustration of the usage of mesoporous films of transparent conducting oxides for novel types of solar cells. The dark gray areas correspond to ITO, the brighter ones to an oxide deposited onto the TCO matrix. The sphere symbolizes a dye. For instance, such films can be used as porous electrodes to include dyes and to deposit semiconductors such as ZnO. 

Transparent composites, sol-gel technology in, 23 81 Transparent conducting oxides (TCOs), 22 135, 12 610-611 Transparent fused silica, 22 401 Transparent lotus effect thin films, 22 121 Transparent nonmetals... 

Fig. 1.19. Transparent conducting oxide electrodes in different types of thin film solar cells. TCO contacts are given at the bottom of each structure. The bottom most row indicates the doping type of the semiconductor, which is in contact to the TCO...

Recently, field-effect transistors based on zinc oxide were reported [173,174], opening the opportunity to design microelectronic devices that are transparent and/or work at high temperatures [175]. More details on thin film transistors employing transparent conducting oxides are given in Chap. 2. 

This process is obviously a natural scattering process in polycrystalline materials, since polycrystalline films exhibit a high concentration of crystallographic defects, especially dislocations [133,134]. However, this process is rarely used to explain experimental data of carrier transport in polycrystalline semiconductors and especially transparent conducting oxides [88], which is mainly due to the fact that in most works on transport properties of polycrystalline films the density of defects was not determined. Podor [135] investigated bended n-type Ge crystals with a dislocation density around 107 cm 2... 

Transparent conducting oxides are widely used as electrodes in thin film optoelectronic devices as solar cells and light emitting diodes because of their transparency for visible light and their high electrical conductivity. Highest optical transparency and electrical conductivity are thus key aspects for such applications. Most work on TCO electrodes is, therefore, dedicated to find deposition parameters, which improve these material parameters. In addition, contact properties are essential for the application of TCOs as electrodes. 

J. Loftier, Transparent Conductive Oxides for Thin-Film Silicon Solar Cells. Ph.D. thesis, University of Utrecht (2005)... 

ZnO and CdO are wide bandgap semiconductors, and these materials may serve as transparent conducting oxides for photovoltaics and flat panel displays. ZnO may also have applications in blue and ultraviolet fight emitting devices and laser diodes. Thin films of zinc and cadmium chalcogenides also have many potential applications. The technological goals of these materials have been smnmarized in several recent... 

This book summarizes the research on many different types of conducting materials in the field of CVD. In Chapter 2, Schulz and Marks report on superconducting films and Krauter and Rees, Jr. report on borides, silicides and nitrides in Chapter 8. In the present chapter we will focus on two classes of conducting materials, nitrides and transparent conducting oxides. It is possible that some aspects can also be found in other chapters of this book, e.g., CVD of Sn02. Nevertheless, they will be discussed in detail to give a consistent description on the state of the art. 

Optical transmission spectra of the films irradiated with H+ ions are shown in Figure 9.13a. A maximum transmittance of about 75% is observed for the as-deposited film whereas the transmittance is decreased for the ion-implanted samples. From the transmittance data, the refractive index and extinction co-efficient are evaluated. The index of refraction value of n=2 and the extinction co-efficient value of nearly k=0 in the visible region is obtained and these values are typical of most of the spinel transparent conducting oxide (TCO) materials. 

---