Thin-Film Actuation

Islam MR, Serpe MJ (2014) Poly (N-isopropylacrylamide) microgel-based thin film actuators for humidity sensing. RSC Adv 4 31937... 

Diaphragm actuation Thick-film piezoelectric actuation Thin-film actuation... 

Quandt, E. Magnetostrictive thin film actuators. Proc. Actuator 94, Axon, Bremen, Germany (1994), pp. 229-232... 

Quandt, E. and Seemann, K. Fabrication of giant magnetostrictive thin film actuators. Proc. IEEE MEMS 1995 (1995), pp. 273-277. 

Such relays are in the form of a small tube inside which is a loosely fitted rotatable shaft, held by a very thin film of this alloy. The alloy senses the motor temperature through a heater connected in series with the motor terminals and surrounding this tube. When the motor current exceeds the predetermined value, the alloy melts and enables the shaft to rotate and actuate the lever of the tripping mechanism. 

K.G. Kreider, M.J. Tarlov, and J.P. Cline, Sputtered thin-film pH electrodes of platinum, palladium, ruthenium, and iridium oxides. Sens. Actuators B. 28, 167-172 (1995). 

H. Suzuki, A. Hiratsuka, S. Sasaki, and I. Karu, Problems associated with the thin-film Ag AgCl reference electrode and a novel structure with improved durability. Sens. Actuators B. 46, 104-113 (1998). 

R. Hintsche, B. Moller, I. Dransfeld, U. Wollenberger, F. Scheller, and B. Hoffmann, Chip biosensors on thin-film metal-electrodes. Sens. Actuators B. B4, 287-291 (1991). 

A. Steinschaden, D. Adamovic, G. Jobst, R. Glatz, and G. Urban, Miniaturised thin film conductometric biosensors with high dynamic range and high sensitivity. Sens. Actuators B. B44, 365-369 (1997). 

K.C. Ho and C.L. Lin, A novel potassium ion sensing based on Prussian blue thin films. Sens. Actuators B-chem. 76, 512-518 (2001). 

Cui, T. Markus, D. Zurn, S. Polla, D. L. 2004. Piezoelectric thin films formed by MOD on cantilever beams for microsensors and actuators. Microsystem Tech. 10 1432-1858. 

Beie, H. J. Gnorich, A. 1991. Oxygen gas sensors based on Ce02 thick and thin films. Sens. Actuators B 4 393-399. 

Mitra, P. Maiti, H. S. 2004. A wet-chemical process to form palladium oxide sensitiser layer on thin film zinc oxide based LPG sensor. Sens. Actuators B 97 49-58. 

Hoefer, U. Steiner, K. Wagner, E. Contact and sheet resistances of Sn02 thin films from transmission line model measurements. Sensors and Actuators B (1995), p. 59-63. 

Giordano, M. Russo, M. Cusano, A. Mensitieri, G. Guerra, G., Syndiotactic polystyrene thin film as sensitive layer for an optoelectronic chemical sensing device, Sens. Actuators B 2005, 109, 177 184... 

M. Stankova, X. Vilanova, E. Llobet, J. Calderer, C. Bittencourt, J. J. Pireaux, and X. Correig, Influence of the annealing and operating temperatures on the gas-sensing properties of rf sputtered WO3 thin-film sensors. Sensors Actuators 105(2), 271—277 (2005). 

G. Sberveglieri. Classical and novel techniques for the preparation of SnOi thin-film gas sensors . Sensors and Actuators B6 (1992), 239-247. 

N. Najafi, K.D. Wise, R. Mechant, and J.W Schwank. An integrated multi-element ultra-thin-film gas analy2er . Digest IEEE Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA (1992), 19-22. 

J. Wollenstein, J.A. Plaza, C. Cane, Y. Min, H. Bottner, and H.L. TuUer A novel single chip thin film metal oxide array . Sensors and Actuators B 93 (2003), 350-355. 

V. Demarne and A. Grisel. An integrated low-power thin-film CO gas sensor on silicon . Sensors and Actuators 13 (1988), 301-313. 

G. Sberveglieri. Thin-film gas sensor implemented on a low-power-consumption mi-cromachined silicon structure . Sensors and Actuators B49 (1998), 88-92. 

M. Jaegle, J. WoUenstein, T. Meisinger, H. Bottner, G. Muller, T. Becker, and C. Bosch-von Braunmilhl. Micromachined thin film Sn02 gas sensors in temperature-pulsed operation mode . Sensors and Actuators B57 (1999), 130-134. 

The energy per unit area as reported for several lithium thin-film batteries ranges from 0.25 to 2 x 10 2 J mm. Thus, thm-fiim batteries, despite their excellent energy per unit volume, fall far short of being able to power a smart dust mote for 1 day. If the areal footprint were made 100 times larger (at 1 cm ), the thin-film approach would be acceptable. The consequences of the 2-D nature of thin-film batteries are easily overlooked. The calculation by Koeneman et al. ignored the 2-D character of thin-film batteries when they concluded that these batteries could carry out some 60 000 actuations of a smart bearing ." When one considers the actual area available for the power source on the device, only about 1200 actuations are possible. 

Y. Mourzina, T. Yoshinobu, J. Schubert, H. Liith, H. Iwasaki and M.J. Schoning, Ion-selective light-addressable potentiometric sensor (LAPS) with chalcogenide thin film prepared by pulsed laser deposition, Sens. Actuators B Chem., 80(2) (2001) 136-140. 

Revzin A, Sirkar K, Pishko M. Glucose, lactate, and pyruvate biosensor arrays based on redox polymer/oxidoreductase nanocomposite thin films deposited on photo-lithographically patterned gold electrodes. Sensors and Actuators B 2002, 81, 359-368. 

In many microelectromechanical systems (mems) based on piezoelectric thin films, flexure is deliberately used to amplify the available displacements (or alternatively to increase the sensitivity of a sensor). For simplicity (and to keep poling and actuation voltages low), films are often poled and driven by electrodes at the top and bottom surfaces. As a result, the critical piezoelectric coefficient is often e31 j, rather than d33j [24], For the direct effect, the effective film coefficient, e3ij can be defined by... 

Moser, I., Jobst, G., Svasek, P., Varahram, M., Urban, G., Rapid liver enzyme assay with miniaturized liquid handling system comprising thin film biosensor array. Sensors Actuators B. 1997, 44, 377-380. 

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