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Silicon dioxide electrical properties

Oxidation of Silicon. Silicon dioxide [7631-86-9] Si02, is a basic component of IC fabrication. Si02 layers are commonly used as selective masks against the implantation or diffusion of dopants into silicon. Si02 is also used to isolate one device from another. It is a component of MOS devices, and provides electrical isolation of multilevel metalliza tion stmctures (12). A comparison of Si and Si02 properties is shown in Table 1. [Pg.346]

Silicon dioxide (Si02), also known as silica, is a major industrial material with many applications particularly in the semiconductor industry in the form of coatings, which are produced mostly by CVD. It is an excellent electrical insulator with very low thermal expansion and good resistance to thermal shock. Its characteristics and properties are summarized in Table 11.4. [Pg.302]

On the other hand, the alkoxide system presented several problems in formulation. The system first chosen as a model consisted of a trimethoxymethyl silane crosslinker, 8000 centistoke HEB siloxane, and a catalyst. A number of catalysts were used and each exhibited different cure rates and electrical properties. DuPont tetraalkoxytitante-Tyzor appears to he one of the better catalysts used in this type of curing system. Fillers are usually incorporated into the silicone formulation to improve mechanical properties, promote adhesion, and to serve as light screening and pigment agents. Cab-o-sil, a form of fumed silica, carbon-black, titanium dioxide and calcium carbonate are then used as RTV fillers. [Pg.178]

D.R. Lamb, Some electrical properties of the silicon-silicon dioxide system, Thin Solid Films, 5(4) (1970) 247-276. [Pg.117]

A reinforcing filler, for example, highly dispersed silicon dioxide, is added to the mixture to produce vulcanizated material with improved strength. Cast silicone organic composites are widely used in electrical and electronic devices, in medicine, in the aircraft industry, etc., due to their ease of processing and the advantageous physical and chemical properties of the cured materials. [Pg.14]

Ferroelectrics are high dielectric materials that are easily polarized in an electric field and can remain polarized to some degree after the field is removed. Such properties make them ideal candidates for computer memory applications and they have been used in the form of thin films as ferroelectric random access memories (FeRAMs) and as high permittivity dielectrics for Dynamic Random Access Memory DRAMs. They have also been looked at as a replacement for silicon dioxide in certain MOS applications. [Pg.3446]

The electrical properties of the film were comparable to that of silicon dioxide films. Apparently, the obtained barrier aluminium oxide film can be seen as an excellent gate dielectric for organic field-effect transistors on flexible substrates. [Pg.511]

In Barillaro et al. (2008), nitrogen dioxide detection by using p+-n silicon diodes surrounded by a PSi layer was demonstrated. Adsorption of NO2 in the PSi layer modifies the electrical properties of the PSi/crystalline silicon interface and, in turn, the p n diode current. The device shows a higher selectivity to NOj in comparison with ethanol, at any polarization voltage and relative humidity level. [Pg.422]

Silicon is a nonmetallic chemical element that is used quite extensively in the manufacturing of transistors and various electronic and computer chips. Pure silicon is not found in nature it is found in the form of silicon dioxide in sands and rocks or found combined with other elements such as aluminum or calcium or sodium or magnesium in the form that is commonly referred to as silicates. Silicon, because of its atomic structure, is an excellent semiconductor, a material whose electrical conductivity properties can be chai d to act either as a conductor of electricity or as an insulator (preventor of electricity flow). Silicon is also used as an alloying element with other elements such as iron and copper to give steel and brass cert desired characteristics. [Pg.516]

Low-temperature silicon dioxide films prepared by evaporating silicon in an oxygen atmosphere onto Mo were studied [30], It was found that the stretching Si—O bond appears as a broad asymmetric peak centered at 1178 cm in IRRAS of the film prepared at 50°C. Upon heating, this peak gradually shifts to higher frequencies up to 1252 cm for a fihn annealed at 1200°C. The correlation of the electric parameters of MOS capacitors with the dielectric and IR properties of the thermal and low-temperature oxides, as well as with their stoichiometry, were investigated [31, 32]. [Pg.483]

The integration of low-k dielectrics into BEOL interconnects is not trivial. In foct, die immoisity of die task parallels the transition from aluminum to cq io wiring. The dudleoges can be attributed to die absence of low-k dielectrics available having electrical, diermal, mechanical, or thermal conductivity properties comparable to silicon dioxide. Low-k materiais, in general, are less dense and typically possess a lower modulus and hardness as well as decreased diermal conductivity. [Pg.162]

Not all amorphous solids are glasses. For example, liquid silicon dioxide is structurally identical to window glass the bonding mechanisms, short-range order, electrical properties, density, and so forth, are the same. Pure elemental silicon, on the other hand, has a liquid state that is very different from the amorphous solid state. The liquid is a metal, and correspondingly dense, whereas the amorphous solid has a much less dense, tetrahedrally bound structure akin to that of diamond and is not metallic. If silicon could be made to form a glass, it would be a dense metal, like the liquid. [Pg.525]

The potential at the external glass surface is developed as a result of ion-exchange reactions with the solution in which it is immersed. The glass structure must maintain anionic sites for the ion exchange. Silicon dioxide of greater than 50% by composition provides this characteristic. The stability, electrical conductivity, and sodium errors of an electrode are somewhat dependent on the ionic properties of other elements (modifier elements) in the glass. The ease with which ionic transfer between glass and solution can occur is the result of these components. [Pg.42]

Silicon dioxide (Si02) is a least expensive material with good thermal and electrical insulation properties. Its resistivity is <10 (Q-cm) and thermal conductivity is about 0.014 (W/cm- C). It is used as a low-cost material for masks in microfabrication process such as etching and deposition. It is also used as a sacrificial material in surface micromachining. [Pg.380]


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See also in sourсe #XX -- [ Pg.586 ]




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