Rutherford Back-Scattering Spectrometry RBS

RBS is based on collisions between atomic nuclei, and it involves measuring the number and energy of ions in a beam which backscatter after colliding with atoms in the near-surface region of a sample. The use of scattering as an analysis tool led to the first in situ chemical analysis of the lunar surface during the landing of Surveyor V. The use of particle accelerators as an a-source was the next powerful step made in Chalk River (Canada) and Arus (Denmark). 

It is possible to measure nearly any type of sample for almost any element with little or no preparation, provided that the sample is stable in a vacuum. RBS is not 

The method is essentially non-destructive, although in some circumstances a target may suffer radiation damage. For example the lattice site position of some dopants in semiconductors can be influenced by RBS analysis. With a typical analysis time of less than 30 min, it is a relatively quick method. Its most important characteristic is 

The three main components of an RBS instrument are a source of helium ions, an accelerator and a detector to measure the energies of the backscattered ions. 

Many RBS installations use a tandem accelerator, producing a 2.25 MeV He++ beam by removing three electrons from He-. 

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Terbium and europium have been incorporated into luminescent porous silicon (PS) by impregnation of PS layers in chloride solution of rare earth. The concentration dependencies of photoluminescence (PL) intensity are examined and Rutherford Back-scattering Spectrometry (RBS) measurements are performed. The excitation mechanisms of Eu and Tb ions in the PS matrix are discussed. 

Abstract Surface analyses have been one of the key technologies for corrosion control and surface finishing. It is very important that the most appropriate apparatus for the purpose of the analyses should be selected from various analytical techniques. In this chapter, surface analytical methods for corrosion control and surface finishing, such as X-ray fluorescence analysis (XRF), X-ray diffraction analysis (XRD), X-ray photo-electron spectroscopy (XPS), scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger electron spectroscopy (AES), Secondary ion mass spectrometry (SIMS), Rutherford back-scattering spectrometry (RBS), Surface-enhanced Raman spectroscopy (SERS), Fourier-transform infrared spectroscopy (FTIR), and so on, are briefly introduced. 

These samples were measured non-destructively by energy-dispersive XRF with synclirotron radiation excitation (SYXRS), by g-XRF, by wavelength-dispersive XRF (WDXRS), and by Rutherford back scattering (RBS), by X-ray reflectometry (XRR) and by destructive secondary ion mass spectrometry (SIMS) as well (both last methods were used for independant comparison). 

Fig. 1. Experimental techniques available for surface studies. SEM = Scanning electron microscopy (all modes) AES = Auger electron spectroscopy LEED = low energy electron diffraction RHEED = reflection high energy electron diffraction ESD = electron stimulated desorption X(U)PS = X-ray (UV) photoelectron spectroscopy ELS = electron loss spectroscopy RBS = Rutherford back scattering LEIS = low energy ion scattering SIMS = secondary ion mass spectrometry INS = ion neutralization spectroscopy.

RBS = IAES = Rutherford back scattering ion-induced Auger electron spectrometry SIMS secondary ion mass spectrometry... 

Field emission scanning electron microscopy (FESEM), glancing incidence x-ray diffraction (GIXRD), transmission electron microscopy (TEM), micro Raman scattering, Fourier transform inftaied (FTIR) spectrometry, Rutherford back scattering (RBS) studies and electron probe micro analysis (EPMA) have been carried out to obtain micro-structural and compositional properties of the diamond/p-SiC nanocomposite films. Atomic force microscopy (AFM) and indentation studies have been carried out to obtain film properties on the tribological and mechanical front. 

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