Rutherford back scattering

These samples were measured non-destructively by energy-dispersive XRF with synclirotron radiation excitation (SYXRS), by g-XRF, by wavelength-dispersive XRF (WDXRS), and by Rutherford back scattering (RBS), by X-ray reflectometry (XRR) and by destructive secondary ion mass spectrometry (SIMS) as well (both last methods were used for independant comparison). 

Metastable quenching spectroscopy Nuclear Reaction Analysis Rutherford back-scattering spectroscopy (or HEIS high-energy ion scattering)... 

Rutherford back-scattering spectroscopy (RBS) is one of the most frequently used techniques for quantitative analysis of composition, thickness, and depth profiles of thin solid films or solid samples near the surface region. It has been in use since the nineteen-sixties and has since evolved into a major materials-characterization technique. The number and range of applications are enormous. Because of its quantitative feature, RBS often serves as a standard for other techniques. 

Therefore, the best approach to investigate photoresist swelling is to determine, in-situ, the SCP in a polymer undergoing dissolution. Although Crank (12) proposed a descriptive SCP in 1953, firm experimental data started to appear only recently. Thomas and Kindle s microdensitometry (13-161 and Kramer s Rutherford back-scattering (17-181 produced SCP of several solvent-polymer combinations. However, these efforts were limited by the spatial resolution of their techniques (ca. 30 nm). In addition, these techniques have been applied to systems where the SPR s are on the order of 1 /xm/hour or less. 

Consequently, we will follow the example of Mills et al. (29) who recently presented the first measurements of local solvent concentration using the Rutherford back-scattering technique. They analyzed the case of 1,1,1-trichloroethane (TCE) diffusing into PMMA films in terms of a simpler model developed by Peterlin 130-311, in which the propagating solvent front is preceded by a Fickian precursor. The Peterlin model describes the front end of the steady state SCP as ... 

Figure 1.4 Comparison of the application ranges of techniques that are sensitive to nearsurface strains. Minimum detection limits are plotted against depth resolution of the measurement. XRD X-ray diffraction DOR differential optical reflectometry. RBS Rutherford back scattering MEIS medium energy ion scattering TEM transmission electron microscopy...

The field of materials analysis by energetic ion beams has begun to mature in the last decade after arising within the nuclear physics community. The basic method, Rutherford back-scattering, has been the subject of a text (1 ), and the field has also engendered a useful handbook (2). Publications are scattered throughout the literature with much of the output in articles relating to the properties of materials. In these the ion beam analysis may form only a part of the work. New developments in technique and applications continue and have been the subject of a series of international conferences (see for example (3) for the latest of these). 

Rutherford Back-scattering Spectroscopy Elemental analysis, profiling He+ 2meV Backscattered ion He-U 10-1-10-4... 

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