Cluster beam deposition

The talk will briefly review some of these developments ranging from high temperature equilibrium plasmas to cool plasmas, PECVD, ion implantation, ion beam mixing and ion assisted etching and deposition. Brief consideration will also be given to sputtering and ionised cluster beam deposition techniques in inorganic synthesis. 

Figure 21. Schematic representation of ionised cluster beam deposition and some of its features.

Table VI. Some uses of Ionised Cluster Beam Deposition...

CoO-coated Co cluster and oxide-coated Fe cluster assemblies were prepared by a plasma-gas-aggregation cluster-beam-deposition technique [37-39]. For preparation of CoO-coated Co cluster assembly, oxygen gas was introduced through a nozzle near the skimmer into the deposition chamber. The Co clusters with CoO shells were formed before deposition onto the substrate [37], Figure 8 shows a TEM image of the clusters produced at oxygen gas flow rate R(02) = 1 seem. Clusters are almost monodispersed, with the mean diameter of about 13 nm. Electron diffraction pattern indicated the coexistence of Co and CoO phases. The cluster assemblies were formed on a polyimide film with a thickness of about 100 nm. 

IONIZED-CLUSTER BEAM DEPOSITION AND EPITAXY by Toshinori Takagi... 

Recently, we have shown the possibility of growing a pure carbon amorphous solid containing a significant amount of carbynoid structures by supersonic carbon cluster beam deposition (SCBD) at room temperature and in an ultra-high vacuum (UHV) [22]. 

Ravagnan, L. Siviero, F. Lenardi, C. Barborini, E. Milani, P. Casari, C. Li Bassi, A. Bottani, C.E. Cluster beam deposition and in situ characterisation of carbyne-rich films. Phys. Rev. Lett. 2002, 89, 285506-1 to -4. 

Finally, it should be noted that Raman spectra of profoundly dehydrohalogenated poly(vinylidene chloride) or poly(vinylidene bromide) reveal striking similarity to the spectra of carbyne-rich nanostructured carbon films produced by supersonic cluster beam deposition [24 26]. 

Here we present some results concerning the role that ion irradiation has in 1. modifying cluster assembled carbon thin films obtained by low energy cluster beam deposition (LECBD) and containing a cabynoid component and 2. producing carbynoid-like materials after irradiation of solid frozen benzene and of asphaltite, a natural bitumen. 

LCAO LD TOP LECBD LED LIP LUMO linear combination of atomic orbitals laser-desorption time-of-flight low energy cluster beam deposition light-emitting diode laser-induced fluorescence lowest unoccupied molecular orbital... 

SCBD SCP SEM SOJT STM supersonic carbon cluster beam deposition self consistent field scanning electron microscope second-order Jahn-Teller effect scanning tunneling microscopy... 

Most of the time, metal/dielectric nanocomposites are studied in the form of solutions or thin solid films on a substrate Colloids, doped and annealed glasses, sol-gels, surfactant-stabilized nanoparticles, micelles, two- or three-dimension self-assembled nanocomposites, self-organized mesoporous oxides filled with metals, electrochemically-loaded template membranes, metal-ion implanted crystals, nanocomposite films elaborated by laser ablation, cluster-beam deposition, radio-frequency sputtering, or nanolithography. 

Figure 22.2. PL study of a sample produced by cluster beam deposition using a chopper for size separation. The upper panel shows a photo of the deposit when it was illuminated by a simple UV lamp. The lower panel reports the PL spectra recorded at the positions indicated by the arrows.

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