Micro-nano devices

For the future work, elastomer tunable optofluidic devices are expected to extend into the nano-optics or nanofluidic fields. Several tunable nano-optical antenna devices fabricated on a stretchable PDMS substrate have been demonstrated recently. Combining elastomer-based micro/nano-devices with nanoplasmonic elements can be interesting for molecule-level imaging and spectroscopy. A tunable elastic nanofluidic channel was demonstrated recently on a PDMS chip for nanoparticle separation and molecule trapping [12]. One of the challenges of PDMS-based tunable nano-devices is to realize the high accuracy in control. High-precision control of PDMS-based tunable structures could be realized by very fine pneumatic actuation or connection to a piezo-actuator. 

Hot-wire anemometers have traditionally been applied in the fields of experimental fluid mechanics and aerospace engineering. Despite the possibilities to measure real-time physical parameters such as temperature, velocity, flow rates, and shear stress, the spatial resolution is limited to the device dimension. The advent of MicroElectroMe-chanical system (MEMS) and nano-scale thermal sensors has revolutionized the spatial and temporal resolution critical to gain entry into micro-fluidics, micro-circulation, biomedical sciences, and cardiovascular medicine. These micro/nano devices are fabricated with the Semiconductor-... 

Sim, H.B. and Kawata, S. (2003) Two-photon laser precision microfabrication and its applications to micro-nano devices and systems. J. Lightwave Technol, 21 (3), 624-633. 

Three-dimensional (3D) structuring of materials allows miniaturization of photonic devices, micro-(nano-)electromechanical systems (MEMS and NEMS), micro-total analysis systems (yu,-TAS), and other systems functioning on the micro- and nanoscale. Miniature photonic structures enable practical implementation of near-held manipulation, plasmonics, and photonic band-gap (PEG) materials, also known as photonic crystals (PhC) [1,2]. In micromechanics, fast response times are possible due to the small dimensions of moving parts. Femtoliter-level sensitivity of /x-TAS devices has been achieved due to minute volumes and cross-sections of channels and reaction chambers, in combination with high resolution and sensitivity of optical con-focal microscopy. Progress in all these areas relies on the 3D structuring of bulk and thin-fllm dielectrics, metals, and organic photosensitive materials. 

Basically, microfluidic devices involve the flow of liquid in the nanoliter range, and, hence they are useful devices in separation science at nano or low level analyses of various ingredients in biological and environmental matrices. The most important applications of micro-fluidic devices include medical, chemical, and separation sciences. 

Micro/Nano Fabrication Technologies and Micro Flow Devices for Future Energy Devices... 

In this session, micro direct methanol fuel cells (DMFC) fabricated by Si MEMS and plastic MEMS are described. For examples of micro/nano fabrication technologies, fine micro plastic fluidic chips fabricated by molding and low temperature bonding are reported. The 3-D metal micro mesh electrode fabricated by simple UV photolithography is described next. For an example of micro flow devices, the pneumatically actuated microvalve and the microreactor having multireagent inlets are introduced. 

Mizuno J, Honda T, Ghnsner T, Ishizuka M, Edura T, Tsutsui K, Ishida H, Shoji S, Wada Y (2004) Fabrications of micro-channel devices by hot emboss and direct bonding of PMMA. In International conference on MEMS, Nano, and Smart systems, Banff, pp 26-29... 

Tlie potential of electronics with organic molecules and the technologies employed in then production, such as soft hthography and self-assembly of monolayers,> the feasibility of micro- and nano-devices for biomedical applications. 

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