Electron beam machining

Electrical discharge machining Electrochemical milling Electron beam machining Laser beam machining Ultrasonic machining... 

These complicated systems are controlled by means of a computer, which in real time monitors the various operating parameters of the column and stage position and which in addition, transfers primary pattern data directly to the electron deflection system. The rate at which the data can be transmitted to the electron optical column ultimately governs the modulation rate of the electron beam machine, i.e., flash time. Modulation rates in excess of 100 MHz have been achieved, and it is conceivable that much higher modulation rates will be attained in the future. 

The insulated core transformer is another direct electron beam machine. It is similar to a three-phase power transformer in that a core and coils are used. One insulated core transformer will drive three accelerator tubes, which allows great flexibility and good power utilization. The Linac (linear accelerator) is an indirect electron beam ma-... 

Characteristics. Electron-beam exposure experiments were carried ut by using a prototlype HL-600 Hitachi Electron-Beam Lithography System which is a vector scanning type variable-shaped electron-beam machine. The acceleration voltage was 30 kV. Resist films were formed on silicon wafers by spin-coating and prebaked at 80 C for 20 min before exposure. 

Resist films of approximately 0.5ym thickness were spun on silicon wafers and cross inked by baking either in an oven or on a hotplate. Incremental exposures were made by a JEOL JBX6A2 electron beam machine at 20 keV. The UV flood exposures were carried out under nitrogen using a 185nm UV lamp. UV dosimetry was carried out on the basis of exposure time which had previously been correlated with the equivalent electron beam exposure by measuring dissolution rates. 

The two principal modes of operation of electron-beam exposure systems include the maskless direct-write electron-beam machines and the mask-based electron-beam machines. Direct-write electron-beam machines operate directly from design data and are capable of extremely high resolution. Mask-based electron-beam systems utilize masks in their imaging process. The implementation of electron-beam lithography in mix-and-match mode with optical lithography in a manufacturing environment has been demonstrated. 

Machine equipped with magneto-strictive transducer, generator power supply Electron beam machine equipped with vacuum of 10 " mm of mercury Gear shaper... 

Electromagnetic grippers, 414 Electron beam machining, 1323 Electronic assembly, 392-396. See also... 

Indonesia is a tropical country with about 144 million Ha of tropical forest, producing a large amount of natural polymers, mainly natural rubber and wood products. In 1991 the total production of natural rubber was about 1.36 million tonnes while the production of log was about 40 million. Such large amount and various kinds of natural polymers were subject to investigation by a number of research centers since before the second WW. Center for the Application of Isotopes and Radiation, using radiation technique as a tool to modify the property of various natural polymers in order to meet the industries. Several Cobalt-60 sources and electron beam machine (EBM) from a small scale to a pilot scale are available. Other polymers such as synthetic fibers also becoming a subject of investigation. 

Electron beam machining (EBM) had been used in aerospace and nuclear industry since 1960 for welding applications. EBM is also used for microdrilling, cutting, and engraving applications. In a vacuum chamber a tungsten cathode filament is heated to between 2500 and 3000 °C to emit electrons, which are focused by a magnetic or static lens system to the worlqjiece specimen, over a well-defined... 

Electron Beam Machining, Fig. 1 Schcanatic diagram of electron beam machining equipmoit... 

As compared with other thermal processing methods, such as laser processing, the advantage of electron beam machining arises from the feature of the electron beam itself (Closs and Drew 1978 Mesyats 1998 Schneider 1989). They are as follows ... 

The advantages of electron beam machining, such as deep penetration and high-speed controllability, enable the drilling of a large number of micro holes at extremely high speed (Closs and Drew 1978 Schneider 1989). The drillable workpiece thickness is less than several millimeters... 

Schneider RW (1989) Electron beam machining. In ASM handbook, vol 16, Machining. ASM International, Materials Park... 

---