Ion beam machining

Ion beam machining is an important nonconventional manufacturing technology used in Micro/Nanofabrication, using a stream of accelerated ions to remove the atoms on the surface of the object. 

Ion Beams Machining (IBM) is an important nonconventional manufacmring technology (Hellborg et al. 2009), which uses a stream of accelerated ions by electrical means in... 

Ion Beam Machining, Fig. 1 Schematic diagram of a Focused Ion Beam (FIB) ion column (a), work principle of FIB imaging (b) FIB milling (c) and FIB induced deposition (d) (Reyntjens and Puers 2001)... 

Types of Ion Beam Machining and its application are described as follows. 

Ion Beam Machining, Fig. 2 Pinhole array fabricatirai result by FIBDW using in the nano-optics... 

Ion Beam Machining, Fig. 3 Micro cutting tool shaped by focused ion beam direct writing (Zhang et al. 2009)... 

Recently we have constructed a new ion beam machine, similar to the machine with which Carrington, Buttenshaw and Roberts first observed the vibration-rotation transitions in HD+ (19). The ions are produced in an electron impact source from a 50/50 mixture of H2/D2 which is passed over a heated Palladium catalyst (10% Pd on activated carbon). The ions are accelerated to a maximum of 5kV and a 90 magnetic sector mass selects the ion of interest, in... 

Nonmechanical nanometric machining. It comprises focused ion beam machining, micro-Electro Dischaige Machining (EDM), and excimer laser machining. 

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