Lasers processing

Institute, Sesimbra Portugal, "Laser Processing Surface Treatment and Film... 

Despite extensive studies, laser photochemical deposition has not yet replaced the conventional processes for fabrication of integrated circuits, except in selected appHcations such as making and breaking of selected links for customization of circuits and in the repair of defects. The reason is that laser processing of an entire wafer has remained more expensive than the conventional processes. 

I. W. Boyd, Laser Processing of Thin Films and Microstructures, Springer-Vedag, Berlin 1987. 

D., Hocker, H., Legewie, F., Poprawe, R., Wehner, M., Wild, M., Laser processing for manufacturing microfluidic devices, in Eheeeld, W. (Ed.), Microreaction Technology 3rd International Conference on Microreaction Technology, Proc. of IMRET 3, pp. 80-89, Springer-Verlag, Berlin (2000). 

R.F. Wood, C. W. White, and R. T. Young, Laser Processing of Semiconductors An Overview... 

G.E. Jellison, Jr., Optical and Electrical Properties of Pulsed Laser-Annealed Silicon R.F. Wood and G.E. Jellison, Jr., Melting Model of Pulsed Laser Processing R.F. Wood and F.W. Young, Jr., Nonequilibrium Solidification Following Pulsed Laser Melting... 

D.M. Zehner, Surface Studies of Pulsed Laser Irradiated Semiconductors D.H. Lowndes, Pulsed Beam Processing of Gallium Arsenide R.B. James, Pulsed C02 Laser Annealing of Semiconductors R. T. Young and R.F. Wood, Applications of Pulsed Laser Processing... 

Aromatic polyimides are well known for their unusual array of favorable physical properties, including excellent thermal stability and excimer-laser processing characteristics. The polyimide structure possesses lower-energy transitions such as n —> n, n —> o, n —> n, and a — n (in order of increasing energy71). However, the w — n and o —> n transitions are forbidden by symmetry rules and related absorptions are significantly weaker than those for... 

Bauerle, D. (1996). Laser Processing and Chemistry (2nd edn.). Springer, Berlin... 

Practical laser processing of materials involves a batch of procedures, each of which has its own requirements preparation of the initial material (with parameters customized for the intended fabrication method), its proper optical exposure, and post-processing aimed at developing or refining the exposed material (e.g., thermal annealing, chemical development, or etching). 

K Upadhya, ed., Plasma and Laser Processing ofMaterials, The Minerals, Metals and Materials Society, Warrendale, Pa., 1991. 

Photoinduced proton transfer may be generated through the large variation in acidity or basicity of functional groups in the excited states of specific structures [8.226] and lead to photoinduced pH jumps [8.227,8.228]. Changes of optical properties by tautomerisation in the excited state [8.229] occur, for instance, in the fluorescent states of bipyridyl diols [8.230a] and form the basis of a proton transfer laser process [8.230b]. 

Current research interest is in the solid phase epitaxial regrowth of amorphous Si using laser processing. RBS has been used to follow the melting and recrystallization of the crystal-amorphous interface (12). This is accomplished by monitoring the backscattered spectrum+with the substrate oriented in a direction that will allow the He to channel along the crystal planes. 

R. F. Wood and G. E. Jettison, Jr., Melting Model of Pulsed Laser Processing... 

---