Tin oxide gas sensor

J.S. Suehle, R.E. Cavicchi, M. Gaitan, and S. Semancik. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing , IEEE Electron Device Letters 14 (1993), 118-120. 

Gong, H. Wang, Y. J. Teo, S. C. Huang, L., Interaction between thin-film tin oxide gas sensor and five organic vapors, Sens. Actuators B 1999, 54, 232-235... 

Several commercial instruments are available. Some comprise conducting polymers, others tin oxide gas sensors (thick or film devices) or metal oxide semiconductors, and combinations. However, none of them can evaluate lAQ as the nose does. 

Crary S B 1986 Recent advances and future prospects for tin-oxide gas sensors... 

Key words Tin oxide, gas sensors, kinetics, volatile compounds, TNT. 

Sears, W. M., Colbow, K., Consadori, F., General Characteristics of Thermally Cycled Tin Oxide Gas Sensors Semiconductor Science and Technology 4 (1989) 351-359. 

Llobet, E., Brezmes, J., Vilanova, X., Sueiras, J.E., Correig, X. Qualitative and quantitative analysis of volatile organic compounds using transient and steady-state responses of a thick-film tin oxide gas sensor array. Sensors and Actuators B - Chemical 41, 13-21 (1997)... 

Figure 8.2 illustrates the time evolution of the conductance of tin oxide gas sensors placed in the ambience of a composting process. Short time signal variations are clearly identified over the noise level and are due to local handlings of compost material. Some other external causes induce diurnal or seasonal variation. 

Fig. 8.2. Example of time evolution of 6 tin oxide gas sensors (Figaro S sensors) in the ambience of a composting plant...

FIGURE 1.12 Chip assembled on standard TO-8 package. (Reprinted from Sens. Actuators B, 58, Horrillo M.C., Sayago L, Ares L., Rodrigo J., Gntierrez J., Gotz A., Gracia I., Fonseca L., Cane C., and Lora-Tamayo E., Detection of low NO2 concentrations with low power micromachined tin oxide gas sensors, 325-329, 1999, with permission from Elsevier.)... 

Rickerby D. G., Horrillo M. C., Santos J. R, and Serrini R, Microstructural characterization of nanograin tin oxide gas sensors, Nanostructured Materials, 9,43-52, 1997. 

The resistance of a tin oxide gas sensor consists of bulk resistance, surface resistance and contact resistance. The reduction of contact resistance is useful for improving the properties of oxide semiconductor gas sensors. An ohmic contact between the electrode and sensing material can reduce the contact resistance. Zhou et al. compared conventional tin dioxide-gold electrode structures with devices in which an n+ layer was introduced between the sensor and electrode. The use of the metal-n+-n contact not only improved the sensitivity of the sensor to alcohol, but also the sensor selectivity to other gases did not change with the addition of an n+ layer. 

Faglia et al used four probe array analysis in the gas detection system to distinguish between the grain contribution and the contact contribution. This suggested that the contact contribution was very important for CO detection, while the material contributes to CH4 detection in tin oxide gas sensors. For four-electrode semiconductor sensor design, CrTiOj (CTO) and W03/Ti02 have mainly been used. 

Srivastava, J. K., Pandey, E, Jha, S. K., Mishra, V. N. and Dwivedi, R. (2011) Chemical Vapor Identification by Plasma Treated Thick Film Tin Oxide Gas Sensor Array and Pattern Recognition, Sens. Transd., 125,42. 

Basic structure of aTaguchi-type tin oxide gas sensor (Figaro Engineering, Japan). 

In 2008 Borah et al. [38] proposed that Neural Network based E-Nose, comprising of an array of four tin-oxide gas sensors, can assist tea quality monitoring during quality grading, principal component analysis (PCA) was used to visualise the different aroma profiles. In addition, K-means and Kohonen s self organising map (SOM) cluster analysis was done, multi layer Perceptron (MLP) network, radial basis function (RBF) network, and constructive probabilistic neural network (CPNN) were used for aroma classification [38]. 

Z. Xiaobo, Z. Jiewen, Comparative analyses of apple aroma by a tin-oxide gas sensor array device and GC/MS. Food Chem. 107, 120-128 (2008)... 

Matsushima S, Maekawa T, Tamald J, Miura N, Yamazoe N (1992) New methods for supporting palladium on a tin oxide gas sensor Sens Actuators B 9 71-78... 

Tang Z, Chan PCH, Sharma PK, Yan G, Hsing I-M, Sin JKO (2001) Investigation and control of microcracks in tin oxide gas sensor thin-film. Sens Actuators B Chem 79 39-47 Hemann M (2007) Porous metal oxides as gas sensors. Chem Eur J 13 8376-8388... 

Olvera ML, Maldonaldo A, Asomoza R (1996) Characterization of a thin film tin oxide gas sensor deposited by chemical spraying. AlP Conf Proc 378 376-381 Osada Y, DeRossi DE (eds) (2000) Polymer sensors and actuators. Springer, Berlin... 

Moseley P, Williams DE (1989) Gas sensors based on oxides of early transition meteds. Polyhedron 8 1615-1618 Mosley PT, Norris J, Williams DE (eds) (1991) Techniques and mechanisms in gas sensing. Adam Hilger, New York Moulson AJ, Herbert JM (1990) Electroceramics materieils, properties, applications. Chapman and Hall, London Mukundan R, Brosha E, Brown D, Garzon F (1999) Ceria-electrolyte-based mixed potential sensors for the detection of hydrocarbons and carbon monoxide. Electrochem Soc Lett 2(8) 412-414 MuUa IS, Ramgir NS, Hwang YK, Chang J-S (2004) Semiconductor tin oxide gas sensors from bulk to thin films. J Ind Eng Chem 10(7) 1242-1256... 

Schreiter M, Gabl R, Lerchner J, Hohlfeld C, Delan A, Wolf G, Bluher A, Katzschner B, Mertig M, Poempec W (2006) Functionalized pyroelectric sensors for gas detection. Sens Actuators B 119 255-261 Sears WM, Colbow K, Consadori F (1989) General characteristics of thermally cycled tin oxide gas sensors. Semicond Sci Technol 4 351-359... 

Cane C, Gracia 1, Gotz A, Fonseca L, Tamay EL, Horrillo MC (2000) Detection of gases with arrays of micromachined tin oxide gas sensors. Sens Actuators B Chem 65 244-246 Canham L (ed) (1997) Properties of porous siUcon. INSPEC, London... 

Hierlemann A, Lange D, Hagleitner C, Kerness N, Koll A, Brand O, Baltes H (2000) Application-specific sensor systems based on CMOS chemical microsensors. Sens Actuators B 70 2-11 Horrillo M, Sayago I, Ares L, Rodrigo J, Gutirrez J, Gotz A, Gracia 1, Fonseca L, Cane C, Lora-Tamayo E (1999) Detection of low NO concentrations with low power micromachined tin oxide gas sensors. Sens Actuators B 58 325-329... 

Heule, M. and Gauckler, L.J. Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries. Sensors Actuators B 2003, 93,100-106. 

Sears, W.M., Colbow, K., and Consadori, E Algorithms to improve the selectivity of thermally-cycled tin oxide gas sensors. Sensors Actuators 1989,19, 333-335. 

Hammond, J.W. and Liu, C.-C. Silicon based microfabricated tin oxide gas sensor incorporating use of Hall effect measurement. Sensors Actuators B 2001, 81, 25-31. 

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