Thin-film Transistor Fabrication by Digital Lithography

Thin-film Transistor Fabrication by Digital Lithography 

William S. Wong, Jurgen H. Daniel, Michael L. Chabinyc, 

Ana Claudia Arias, Steven E. Ready, and Rene Lujan 

While these polymeric materials hold promise for low-cost electronics and simplified device processing, they still suffer from lower performance than conventional inorganic semiconductors. As the development of these novel materials continues, an alternative technology incorporating patterning schemes such as inkjet printing and conventional vacuum deposited thin films, may provide the required overlap of performance with low-cost fabrication of microelectronic circuits on large-area platforms. 

Alternatives to conventional photolithography will enable both reduction in cost and complexity for large-area electronics fabrication and will also help enable a transition from rigid substrates to flexible platforms. The transition towards roll-to-roll processing of flexible electronics may be required to follow the roadmap for low-cost large-area electronics. 

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De Gennes, P.G., Wetting Statics and dynamics. Rev. Mod. Phys. 57, 827-863, 1985. Street, R.A. et al.. Jet printing flexible displays. Mater. Today 9, 32-37, 2006. Wong, W.S. et al.. Hydrogenated amorphons silicon thin-film transistor arrays fabricated by digital lithography, IEEE Electron Device Lett. 24, 577-579, 2003. 

W. S. Wong et al.. Hydrogenated amorphous silicon thin-film transistor arrays fabricated by digital lithography, IEEE Electron Device Lett., 24, 577, 2003. 

As a first demonstration of the fabrication of TFT devices by digital lithography, tri-layer insulated-gate thin-film transistors were fabricated on four-inch glass substrates using a three-layer wax-mask process. Mask layers were used to define the... 

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