Lithography digital

Thin-film Transistor Fabrication by Digital Lithography... 

Fig. 11.4. Optical micrographs of patterned mask levels by digital lithography for (a) gate level, (b) island level, and (c) source/drain level.

As a first demonstration of the fabrication of TFT devices by digital lithography, tri-layer insulated-gate thin-film transistors were fabricated on four-inch glass substrates using a three-layer wax-mask process. Mask layers were used to define the... 

The combination of digital lithography with an additive printing process for de-... 

Fig. 11.7. Optical micrograph of a completed TFT array patterned by digital lithography.

Fig. 11.12. I-V transfer and output curves for a typical BCE TFT device patterned by digital lithography.

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