Salts, acid generating

T. Iwamoto, M. Akita, T. Kozawa, Y. Yamamoto, D. Werst, D.A. Trifunac, and D. Alexander, Radi ation and photochemistry of onium salts acid generators in chemically amplified resists, Proc. SPIE 3999, 204 213 (2000) A. Nakano, K. Okamoto, Y. Yamamoto, T. Kozawa, S. Tagawa, T. Kai, H. Nemoto, and T. Shimokawa, Deprotonation mechanism of poly(4 hydroxystyrene) and its deriva tives, Proc. SPIE 5753, 1034 1039 (2005) T. Kozawa, A. Saeki, and S. Tagawa, Modeling and simulation of chemically amplified electron beam, x ray, and EUV resist processes, J. Vac. Sci. Technol. B 22(6), 3522 3524 (2004) T. Kozawa, A. Saeki, A. Nakano, Y. Yoshida, and S. Tagawa, Relation between spatial resolution and reaction mechanism of chemically amplified resists for electron beam hthography, J. Vac. Sci. Technol. B 21(6), 3149 3152 (2003). 

The aramids are formed in the low temperature reaction, -10 to 60°C, of equimolar amounts of the diacid chloride and the diamine in an amide solvent, typically dimethyl acetamide (DMAc) or A/-meth5i-2-pyrrohdinone (NMP) and usually with a small amount of an alkaU or alkaline-earth hydroxide and a metal salt, such as LiOH [1310-65-2] LiCl, Ca(OH)2 [1305-62-0] or CaCl2 added to increase the solubiUty of the polymer and neutralize the hydrochloric acid generated in the reaction. 

Tendering Effects. CeUulosic materials dyed with sulfur black have been known to suffer degradation by acid tendering when stored under moist warm conditions. This effect may result from the Hberation of small quantities of sulfuric acid which occurs when some of the polysulfide links of the sulfur dye are mptured. A buffer, such as sodium acetate, or a dilute alkaH in the final rinse, especially after oxidation in acidic conditions, may prevent this occurrence. Copper salts should never be used with sulfur black dyes because they cataly2e sulfuric acid generation. Few instances of tendering with sulfur dyes other than black occur and the problem is largely confined to cotton. 

The most widely used homogeneous catalysts are simple acids and bases which catalyse well-known reactions such as ester and amide hydrolysis, and esterification. Such catalysts are inexpensive enough that they can be neutralized, easily separated fi om organic materials, and disposed of. This, of course, is not a good example of green chemistry and contributes to the huge quantity of aqueous salt waste generated by industry. 

Pyridinium chloride is a salt that generates ions in solution. The major species are the pyridinium cation (C5 H5 NH+), cr, and H2 O. The formula identifies the pyridinium cation as the conjugate acid of the weak base, pyridine (see Table 17-41. There are two acid-base equilibria with major species as... 

Public information about the specific chemical identity of the surfactants and stabilizers in use is scant(353-355) (Figure 11). Performance of foamed fluids is heavily dependent upon the size and distribution of the individual foam cells that are present, therefore the generator, testing apparatus, pressure and procedures employed are critical parts of the evaluation and the observed results. Contaminants (salts, acids, alkalies, etc) in the liquid phase also can cause drastic changes in foam performance. 

Nitroaniline reacts almost explosively [1], and 4-nitroaniline, 4-nitroacetanilide, aminonitrobiphenyls, aminonitronaphthalenes and their various derivatives [2], as well as some nitro-N-heterocycles [1,2], also react vigorously. 4-Nitroanilinium sulfate and 4-nitroaniline-2-sulfonic acid and its salts also generate foams when heated without sulfuric acid. The mechanism is not clear, but involves generation of a polymeric matrix foamed by sulfur dioxide and water eliminated during the reaction [1]... 

The synthesis of 3-aryltetrahydroisoquinolines was accomplished by electrophilic aromatic substitution of polysubstituted phenols and phenyl ethers with Lewis acid-generated tosyliminium ions of 2-tosyl-3-methoxytetrahydroisoquinoline derivatives <00SL801>. In addition isoquinoline was reported to react with N-tosylated (R)- or (S)-amino acid fluorides to afford optically active dihydroimidazoisoquinolinones. The reaction proceeds via acylation followed by attack of the tosylamino group at Cl of the intermediate 2-tosylaminoacylisoquinolinium salt <00TL5479>. 

Bronsted Acid Generation from Triphenylsulfonium Salts in Acid-Catalyzed Photoresist Films... 

Scheme 1. Mechanisms for acid generation from triphenylsulfonium salts.

A quantum yield was determined for acid generation based on the total absorbance of the film and the reflectivity from single crystal silicon at 254 nm. Total film absorbance at 254 nm is 0.185 which corresponds to 35% absorption by the film. Reflectivity at 254 nm is 0.66 (17) and so an additional 15% of the incident light is absorbed after reflection. Total absorption was taken to be 50% of incident dose. It should be noted that the resin absorption without sulfonium salt is 0.155 and thus constitutes about 84% of the total film absorbance with sulfonium salt. 

Thus the quantum yield for acid production from triphenylsulfonium salts is 0.8 in solution and about 0.3 in the polymer 2 matrix. The difference between acid generating efficiencies in solution and film may be due in part to the large component of resin absorption. Resin excited state energy may not be efficiently transferred to the sulfonium salt. Furthermore a reduction in quantum yield is generally expected for a radical process carried out in a polymer matrix due to cage effects which prevent the escape of initially formed radicals and result in recombination (IS). However there are cases where little or no difference in quantum efficiency is noted for radical reactions in various media. Photodissociation of diacylperoxides is nearly as efficient in polystyrene below the glass transition point as in fluid solution (12). This case is similar to that of the present study since the dissociation involves a small molecule dispersed in a glassy polymer. 

The irradiation of films prepared from 1% triphenylsulfonium salts in poly(4-t-butoxycarbonyloxystyrene) with lithographically useful doses of 254 nm light generates acid which is less than 0.1% of the t-BOC groups. The efficiency of the photochemistry is several times less than the efficiency of acid generation from triphenylsulfonium salts in solution. The catalytic chain is about 1000 for the t-BOC deprotection step at 100°C. This implies that catalyst diffusion during postbake is on the order of 50A... 

A nonionic, non-volatile photoactive acid generator, 2,6-dinitrobenzyl tosylate has been recently reported and shown to be effective in chemically amplified resist systems (10). This ester is a nonionic compound that has a much wider range of solubility in matrix polymers and does not contain undesirable inorganic elements. While it is known to exhibit a lower sensitivity to irradiation than the onium salt materials, many structural variations can be produced to precisely vary the acid properties of the molecule and to control the diffusion of the AG in the polymer matrix (11). 

Deep-UV resists comprised of matrix polymers and a 2,6-dinitrobenzyl tosylate photoactive acid generator have been described and compared to previously reported onium salt systems. Although these resists exhibited lower sensitivity than onium salt-based materials, the contrast and processibility are superior. The use of a matrix polymer capable of radiation-induced chain scission improves the sensitivity and allows the 2,6-dinitrobenzyl tosylate acid generator to more nearly... 

Acid-catalyzed photoresist films acid diffusion, 35 acid generation, 303233/341 advantages, 28 catalytic chain length, 3435r development of classes of cationic photoinitiators, 28 experimental procedure, 35-36 generation mechanism from irradiation of triphenylsulfonium salts, 28-29 merocyanine dye method for acid analysis, 30,31/33/... 

Theory The nitrous acid, generated on the introduction of sodium nitrite solution into the acidic reaction mixture, reacts with the primary amino group of sulphanilamide quantitatively, resulting into the formation of an unstable nitrite that decomposes ultimately with the formation of a diazonium salt. The diazonium salt thus produced is also unstable, and if the reaction mixture is not maintained between 5-10°C, it shall undergo decomposition thereby forming phenol products which may react further with nitrous acid. The reactions involving the formation of the diazonium salt may be expressed in the following manner ... 

The iminium salt 132, generated from benzylamine hydrochloride and aqueous formaldehyde, reacts with cyclopentadiene during 3 h at room temperature to give, after basification, the cycloadduct 133 in nearly quantitative yield (equation 70). Other examples of this reaction are shown in equations 71-75. The separable diastereomers 134 and 135 are formed in the ratio 4 1 from cyclopentadiene, (—)-a-methylbenzylamine hydrochloride and aqueous formaldehyde in a combined yield of 86% (equation 75)62. Hydrochlorides 136 of methyl esters of natural amino acids [(S )-valine, (S )-isoleucine] react with cyclopentadiene and formaldehyde in aqueous THF to produce mixtures of the diastereomers 137 and 138, in which the former predominate (equation 76)63. 

Hydrolysis of unreacted acid chloride is carried out without neutralization of the acid generated. In the presence of a base such as sodium carbonate or sodium bicarbonate the anhydride of 2-toluic acid would be formed, in addition to the sodium salt of the free acid. This anhydride is much less reactive toward hydrolysis than the acid chloride. 

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