Rutherford backscattering spectrometry

RBS is the most commonly used non-destructive nuclear method for elemental depth analysis of nm to gm thin films. It involves measurement of the number and energy distribution of energetic ions (usually protons or He ) elastically back-scattered within the near-surface region of solid targets. From such measurements it is possible to determine, with some limitations, both the atomic mass and the content of elemental target constituents as a function of depth below the surface. 

An ion beam with an energy of the order of 100 keV to several MeV is provided by an accelerator and impinges on a sample located in a vacuum chamber (vacuum of the order 10 10 Pa). Samples are mounted, several per load, on the table of a goniometer which allows three degrees of freedom, two for the sample position and one for the angle, so as to enable sample changing and manipulation without breaking the vacuum. Surface barrier detectors are primarily used for ion detection. 

The sample could be a multilayer system or bulk material. The lateral and interlayer homogeneity is important to obtain an undeformed spectrum for quantitative analysis. 

The sensitivity of RBS for the detection of trace impurities in bulk samples depends strongly on the sample composition and the experimental conditions. For impurities heavier than the substrate, the signal of which lies in the background-free region, it is possible to measure infinitesimal amounts of impurities simply by increasing the integrated charge. The near surface depth resolution 

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Rutherford backscattering spectrometry is the measurement of the energies of ions scattered back from the surface and the outer microns (1 micron = 1 pm) of a sample. Typically, helium ions with energies around 2 MeV are used and the sample is a metal coated silicon wafer that has been ion implanted with about a... 

The discussion of Rutherford backscattering spectrometry starts with an overview of the experimental target chamber, proceeds to the particle kinematics that detennine mass identification and depth resolution, and then provides an example of the analysis of a silicide. 

The essentially non-destmetive nature of Rutherford backscattering spectrometry, combmed with the its ability to provide botli compositional and depth mfomiation, makes it an ideal analysis tool to study thm-film, solid-state reactions. In particular, the non-destmetive nature allows one to perfomi in situ RBS, thereby characterizing both the composition and thickness of fomied layers, without damaging the sample. Since only about two minutes of irradiation is needed to acquire a Rutherford backscattering spectmm, this may be done continuously to provide a real-time analysis of the reaction [6]. 

Rutherford Backscattering Spectrometry High-Energy Ion Scattering... 

Rutherford Backscattering Spectrometry (RBS) in-depth concentration profiles were determined by Rutherford backscattering spectrometry by using a 2.2 MeV He beam at INFN-Legnaro National Laboratories, Legnaro-Padova (Italy). 

Neutron Activation Analysis X-Ray Fluorescence Particle-Induced X-Ray Emission Particle-Induced Nuclear Reaction Analysis Rutherford Backscattering Spectrometry Spark Source Mass Spectrometry Glow Discharge Mass Spectrometry Electron Microprobe Analysis Laser Microprobe Analysis Secondary Ion Mass Analysis Micro-PIXE... 

Rutherford backscattering spectrometry (RBS) which analyses the elastic scattering of the particle beam from the target nuclei. Most RBS analyses use less than 2.2 MeV He++ beams. 

The samples were characterized by using X-ray diffraction, Fourier transform infrared spectroscopy, scanning electron microscopy, 57Fe Mossbauer spectroscopy [2] and Rutherford backscattering spectrometry (RBS). 

Rutherford backscattering spectrometry spect A method of determining the concentrations of various elements as a function of depth beneath the surface of a sample, by measuring the energy spectrum of ions which are backscattered out of a beam directed at the surface. roth-or-ford bak,skad-3-rir spek tram-o-tre rutherfordium chem A chemical element, symbolized Rf, atomic number 104, a synthetic element the first element beyond the actinide series, and the twelfth transuranium element., r3lh 3t fdr-de-3m ... 

Pritzkow et al 46 described the application of surface and near-surface analytical methods such as ICP-IDMS (after dilution of layer), Rutherford backscattering spectrometry (RBS) and instrumental... 

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