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OMVPE epitaxy

MOCVD (metal-organic chemical vapor deposition), OMVPE (organometallic vapor-phase epitaxy), and HVPE (hydride vapor-phase epitaxy) have some... [Pg.239]

ODENDOR ODLTS ODMR OICTS OLCAO OMVPE OSC optically detected electron nuclear double resonance optical deep level transient spectroscopy optically detected magnetic resonance optical isothermal capacitance transient spectroscopy orthogonalised linear combination of atomic orbitals organo-metallic vapour phase epitaxy on-surface-cracking... [Pg.697]

The potential benefits of CVD over other film deposition techniques are that CVD-derived films can be deposited under conditions that give conformal coverage, they can be deposited at low temperatures, there can be a high level of compositional control, thin layers can be deposited, the technique can be scaled to coat large areas uniformly, and there is also the possibility for area-selective deposition13 as a result of the chemical nature of this process. The details of CVD and related chemical deposition processes such as atomic layer epitaxy (ALE), organometallic vapor-phase epitaxy (OMVPE), and others have been described elsewhere.6... [Pg.217]

We found recently(8) that organic ditellurides (RTeTeR, R=some organic moiety) are potentially useful tellurium source compounds for the preparation of Te-containing II-VI compounds by organometallic vapor phase epitaxy (OMVPE). In the course of those investigations we found (9) that di(aryltellurato) mercury compounds [(RTe)2Hg], formed from the ditelluride and Hg,... [Pg.188]

Mixed metal oxides can be addressed as belonging to three main fields, namely superconducting metal oxides (SMOs) (Section V.D.l), transparent conductive oxides (TCOs) (Section V.D.2) and ferroelectric oxides (Section V.D.3). The synthesis procedures for mixed metal oxides include sintering, sol-gel, PLD or laser ablation, sputtering evaporation, MBE, MOVPE (metal-organic vapor-phase epitaxy), OMVPE (organometallic vapor-phase epitaxy) and CVD in particular. [Pg.1001]

A method that overcomes some of these limitations is metal-organic chemical vapor deposition (MOCVD), sometimes called organometallic vapor phase epitaxy (OMVPE) °. An organometallic compound such as a group IIB alkyl reacts with a chalcogenide hydride on a substrate that is at the highest temperature in the chamber ... [Pg.401]

Organometallic Vapor Phase Epitaxy (OMVPE) System Technology. . . 208... [Pg.193]

See other pages where OMVPE epitaxy is mentioned: [Pg.2929]    [Pg.368]    [Pg.737]    [Pg.737]    [Pg.231]    [Pg.656]    [Pg.303]    [Pg.49]    [Pg.52]    [Pg.61]    [Pg.64]    [Pg.70]    [Pg.368]    [Pg.360]    [Pg.164]    [Pg.187]    [Pg.213]    [Pg.440]    [Pg.411]    [Pg.426]    [Pg.83]    [Pg.140]    [Pg.264]    [Pg.191]    [Pg.3]    [Pg.5]    [Pg.351]    [Pg.148]    [Pg.149]    [Pg.173]    [Pg.1]    [Pg.5]    [Pg.6]    [Pg.6]    [Pg.10]    [Pg.193]    [Pg.196]    [Pg.197]    [Pg.198]   


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Epitaxial

Epitaxis

Epitaxy, epitaxial

Organometallic Vapor Phase Epitaxy (OMVPE) System Technology

Organometallic vapor phase epitaxy OMVPE)

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