Organometallic Vapor Phase Epitaxy OMVPE System Technology

3 Organometallic Vapor Phase Epitaxy (OMVPE) System Technology 

OMVPE processing system for compound semiconductors. The system is comprised of 

1) Carrier gas purification module Generally a palladium cell or a chemical resin purifier is used to purify hydrogen, the standard carrier gas for IIl-V, II-VI and most IV-IV reactions. Resin purifiers also are often used with Ar, He or N2 which are frequently employed as carrier gases. This may be onboard the system or at the gas source. However, the closer to the point of use, the less chance for contamination of the process. 

2) Hydride (gas) purification module These modules generally provide for in-system purifiers, such as resin purifiers and vacuum pumping (for leak checking and purging). 

4) Dopant dilution module Dopants generally are introduced in sub percent levels, often requiring the dilution of high concentration pure materials. For example, a common 1 or 2 % high purity gas mixture may be diluted at 1000 1 within the sys- 

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Organometallic Vapor Phase Epitaxy (OMVPE) System Technology. . . 208... 

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