Nano-electromechanical systems

Three-dimensional (3D) structuring of materials allows miniaturization of photonic devices, micro-(nano-)electromechanical systems (MEMS and NEMS), micro-total analysis systems (yu,-TAS), and other systems functioning on the micro- and nanoscale. Miniature photonic structures enable practical implementation of near-held manipulation, plasmonics, and photonic band-gap (PEG) materials, also known as photonic crystals (PhC) [1,2]. In micromechanics, fast response times are possible due to the small dimensions of moving parts. Femtoliter-level sensitivity of /x-TAS devices has been achieved due to minute volumes and cross-sections of channels and reaction chambers, in combination with high resolution and sensitivity of optical con-focal microscopy. Progress in all these areas relies on the 3D structuring of bulk and thin-fllm dielectrics, metals, and organic photosensitive materials. 

The first approach is to minimize energy consumption from the demand side. Integrating nano-electronics, nano-electromechanical systems, and nano-ma-terials, a series of novel devices will replace all those developed by TDBT [130-132]. Lighter yet stronger material, more energy efficient and with less internal friction, created via MNT, will automatically lead to less energy consumption. 

Once MNT-enabled solar energy becomes the exclusive energy source, problems such as acid rain and smog should not exist. In addition, future vehicles that are constructed from nano-materials, driven by nano-electromechanical systems and powered by hydrogen fuel cells (see Fig. 7) or solar cells (see Fig. 8) should totally eliminate transportation-related S02 and NOx emission. Therefore, the anthropogenic release of S02 and NOx that has assaulted the atmosphere since the Industrial Revolution should be ceased further acidification of the environment and the threat to human health will be relieved [31-33]. 

Modeling and development of an IPMC based distal tip guide wire stirrer were presented. IPMCs can be cut arbitrarily smaller or larger for applications in micro-electromechanical systems (MEMS), nano-electromechanical systems (NEMS),... 

As hierarchical, multiscale and complex properties in nature, as shown inO Fig. 52.1, adhesion is an interdisciplinary subject, which undergoes vast experimental, numerical and theoretical investigations from microscopic to macroscopic levels. As an example, adhesion in micro- and nano-electromechanical systems (MEMS/NEMS) is one of the outstanding issues in this field including the micromechanical process of making and breaking of adhesion contact, the coupling of physical interactions, the trans-scale (nano-micro-macro) mechanisms of adhesion contact, adhesion hysteresis, and new effective ways of adhesion control (Zhao et al. 2003). 

TFL is an important sub-discipline of nano tribology. TFL in an ultra-thin clearance exists extensively in micro/nano components, integrated circuit (IC), micro-electromechanical system (MEMS), computer hard disks, etc. The impressive developments of these techniques present a challenge to develop a theory of TFL with an ordered structure at nano scale. In TFL modeling, two factors to be addressed are the microstructure of the fluids and the surface effects due to the very small clearance between two solid walls in relative motion [40]. 

The ability to control surface wettability has attracted significant attention in the open literature from both the academic and industrial points of view. Numerous micro/nano systems such as Micro Electromechanical Systems (MEMS), lab-on-a-chip, or microfluidic systems require surfaces with low adhesion and friction [1]. Due to the small size of these devices, the surface forces tend to dominate over the volume forces, and, therefore, control of the adhesion and friction becomes a challenging problem for good operation of these systems. In order to reduce the surface adhesion for such applications, development of non-wettable and non-adhesive surfaces seems to be crucial. 

The final, capstone talk, by Heruy Hess (Colirmbia University), is on how biomolecules can be used as motor-powered devices in systems, whether the system is the cell itself or whether biomolecules are used to provide an actuation mechanism on a micro/nano-electromechanical (MEMS/NEMS) device. 

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