Layer Removal

The damaged layer left by the CMP on the insulator depends to a large extent to the polished material and CMP conditions. It can practically reach 

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For the examination of the applied metallic or ceramic layer, the test object is heated up from the outside The heat applying takes place impulse-like (4ms) by xenon-flash lamps, which are mounted on a rack The surface temperature arises to approx 150 °C Due to the high temperature gradient the warmth diffuses quickly into the material An incorrect layer, e g. due to a delamiation (layer removal) obstructs the heat transfer, so that a higher temperature can be detected with an infrared camera. A complete test of a blade lasts approximatly 5 minutes. This is also done automatically by the system. In illustration 9, a typical delamination is to be recognized. 

Vinylacetic acid. Place 134 g. (161 ml.) of allyl cyanide (3) and 200 ml. of concentrated hydrochloric acid in a 1-htre round-bottomed flask attached to a reflux condenser. Warm the mixture cautiously with a small flame and shake from time to time. After 7-10 minutes, a vigorous reaction sets in and the mixture refluxes remove the flame and cool the flask, if necessary, in cold water. Ammonium chloride crystallises out. When the reaction subsides, reflux the mixture for 15 minutes. Then add 200 ml. of water, cool and separate the upper layer of acid. Extract the aqueous layer with three 100 ml. portions of ether. Combine the acid and the ether extracts, and remove the ether under atmospheric pressure in a 250 ml. Claisen flask with fractionating side arm (compare Fig. II, 13, 4) continue the heating on a water bath until the temperature of the vapour reaches 70°. Allow the apparatus to cool and distil under diminished pressure (compare Fig. II, 20, 1) , collect the fraction (a) distilling up to 71°/14 mm. and (6) at 72-74°/14 mm. (chiefly at 72 5°/ 14 mm.). A dark residue (about 10 ml.) and some white sohd ( crotonio acid) remains in the flask. Fraction (6) weighs 100 g. and is analytically pure vinylacetic acid. Fraction (a) weighs about 50 g. and separates into two layers remove the water layer, dry with anhydrous sodium sulphate and distil from a 50 ml. Claisen flask with fractionating side arm a further 15 g. of reasonably pure acid, b.p. 69-70°/12 mm., is obtained. 

Ethyl S-n-butyl xanthate. Use 32 g. of potassium ethyl xanthate, 37 g. (23 ml.) of n-butyl iodide (Section 111,40) and 50 ml. of absolute ethyl alcohol. Reflux on a water bath for 3 hours. Pour into 150 ml. of water, saturate with salt (in order to facilitate the separation of the upper layer), remove the upper xanthate layer, wash it once with 25 ml. of saturated salt solution, and dry with anhydrous calcium chloride or anhydrous calcium sulphate. Distil from a 50 ml. Claisen flask under reduced pressure. Collect the pale yellow ethyl S-n-butyl xanthate at 90-91°/4 mm. The yield is 34 g. 

The methods used to measure residual stresses in a eomponent are performed after the manufaeturing proeess, and are broadly elassed into two types meehanieal (layer removal, eutting) and physieal (X-ray diffraetion, aeoustie, magnetie). Further referenee to the methods used ean be found in Chandra (1997), Juvinall (1967), and Timoshenko (1983). 

A large amount of high-boiling solid material—presumably the intermediate alcohol—is obtained by the original procedure. If the crude product, remaining after the removal of the ether, is boiled for an hour with 100 cc. of 20 per cent sulfuric acid, the aqueous layer removed, and the oil distilled (without being washed) under reduced pressure, the yield of pure hydrocarbon equals that claimed. 

The result indicating that the interface metal atoms in the supported clusters approximated as Rhe are charged, whereas those one layer removed from the support surface are not, leads to the question of the charge of the metal atoms in a flat metal raft. The issue has been addressed in experiments with y-Al203-supported clusters approximated well as Res, which were formed from H3Re3(CO)i2 [34]. The rhenium atoms were inferred on the basis of... 

The solution is cooled until its temperature is approximately that of the room, and 500 ml. of a mixture of equal parts of concentrated hydrochloric acid and water is added with stirring. The flask is then arranged for steam distillation and heated with a free flame while steam is passed into the reaction mixture until about 200 ml. of distillate is collected (Note 5). While hot, the mixture is placed in a large separatory funnel and the lower aqueous layer removed the nitrobenzene layer is filtered through a Buchner funnel (Notes 6 and 7). 

Figure 2. Adsorption of soluble calf skin collagen, o Collagen layer over entire surface A Collagen layer removed from measuring bulb...

To eliminate the above uncertainties in the interpretation of the transport data, Hall-effect measurements were combined with layer removal on homogeneously doped n-type layers (Johnson and Herring, 1988a). The... 

Another open question is the relationship between the H-induced radiative recombination centers and the H-induced platelets. Controlled layer removal of the plasma-processed silicon surface reveals that the density of luminescence centers decays nearly exponentially with a decay length that is comparable to the depth over which the platelets form (Northrop and Oehrlein, 1986 Jeng et al., 1988 Johnson et al., 1987a). However, the defect luminescence has also been obtained from reactive-ion etched specimens in which platelets were undetectable (Wu et al., 1988). Finally, substantial changes in the luminescence spectra occur at anneal temperatures as low as 250°C (Singh et al., 1989), while higher temperatures... 

Copper bromide and pentakis-A-(heptadecafluoroundecyl)-l,4,7-triazeheptane (1 in Figure 10.9), along with an initiator, ethyl-2-bromoisobutyrate (2 in Figure 10.9), in a perfluoromethylcyclohexane-toluene biphase efficiently catalyse the polymerization of methyl methacrylate, with a conversion of 76 % in 5 h at 90 °C. The resultant polymer has a Mn = 11100 and a molar mass distribution of 1.30. After polymerization, the reaction was cooled to ambient temperature, the organic layer removed and found to contain a copper level of 0.088 % (as opposed to 1.5% if all the catalyst were to have remained in the polymer). A further toluene solution of monomer and 2 could be added,... 

Total internal reflection (TIR) of light within the thin ITO layer removes light of frequencies corresponding to the thickness of the film so, if light of A. = 500 nm is removed, then only red and blue remain, which therefore gives the purple colour. 

Figure 12. FTIR spectrum of the layer removed from plasma-treated PE by dissolving in deionized water (details of the sample preparation are given. [78]).

Above described results prove that plasma treatment of PE leads to cleveage of molecular chain and production of polar groups. Since these changes may enhance interaction with polar solvents, the water etching of modified PE was examined the calculated thickness of the surface layer removed from plasma-modified PE (240 s, 8.3 W) by 24 hour water etching is 20.6 4.6 nm [78]. 

It was observed elsewhere that plasma treatment of polymer macromolecules results in their cleavage, ablation, alterations of chemical structure and thus affects surface properties e.g. solubility [75]. The effects of the treatment in Ar plasma on the surface properties of PE were examined in [72]. The parameters of the plasma discharge (240 s, 8.3 W power) were chosen, on the basis of our previous experiments [70-74,78], to guarantee the most pronounced changes of polymer surface. Mean thickness of the ablated PE layer was calculated from the weight difference measured by gravimetry. By Ar plasma (8.3 W, 240 s) 30 8 nm thick surface layer is ablated and thickness of the surface layer removed from plasma-modified PE by 24 hour water etching is 21 5 nm [78]. 

With the growing level of control of copper CMP process comes the requirement for temperature control. Copper CMP is highly temperature sensitive, so hot slurry will enhance the removal of bulk copper. However, barrier metals are significantly less reactive (with the slurries currently available), so there is a significantly greater mechanical contribution to the removal of the barrier layer(s). Consequently, hot slurry is of little benefit for barrier layer removal and may soften the pad and aggravate metal dishing and dielectric erosion. 

Oxidation of the Cu02 layer removes electrons from the x2-y2 bands which have antibonding character in the in-plane Cu-O bonds. Therefore, as the number of holes (nH) increases, the in-plane Cu-O bond length (rCu 0) is shortened. In addition to this electronic factor, the in-plane rCu 0 is also controlled by a nonelectronic factor (i.e., steric strain) associated with the cations located at the 9-coordinate sites adjacent to the Cu02 layers (e.g., La, Sr, Ba) (40). With the increasing size of the 9-coordinate site cations, the in-plane Cu-O bond is lengthened to reduce the extent of the resulting steric strain. 

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