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Fluidic MEMS

Microfabrication techniques used for the production of MEMS (micro electro-mechanical systems) have been successfully used to produce highly efficient micro fluidic systems. [Pg.324]

Chung, J.W., Grigoropoulos, C.P., Greif, R., Infrared thermal velocimetry in MEMS-based fluidic devices. J. Microelectromech. Syst. 2003, 12, 365-372. [Pg.427]

In this session, micro direct methanol fuel cells (DMFC) fabricated by Si MEMS and plastic MEMS are described. For examples of micro/nano fabrication technologies, fine micro plastic fluidic chips fabricated by molding and low temperature bonding are reported. The 3-D metal micro mesh electrode fabricated by simple UV photolithography is described next. For an example of micro flow devices, the pneumatically actuated microvalve and the microreactor having multireagent inlets are introduced. [Pg.50]

Production of extremely high-resolution, sub-micrometer features as required in the fabrication of microelectronic circuits, MEMS, MOEMS, micro- and nano-fluidic circuits, and Lab-on-a-Qiip (LOC) devices (Madou 2002)... [Pg.485]

Cheng CM, Liu CH (2006) A capillary system with thermal-bubble-actuated IxN micro fluidic switches via time-sequence power control for continuous liquid handling. J MEMS 15(2) 296-307... [Pg.238]

Armani M, Chaudhary S, Probst R, Shapiro B (2005) Using feedback control and micro-fluidics to steer individual particles. In Proceedings 18th TREE inter-natimial ctmference on MEMS, Miami... [Pg.490]

Wu SY, Lin Q, Yuen Y, Tai YC (2001) MEMS flow sensors for nano-fluidic applications. Sens Actuators A 89 152... [Pg.3319]

While microelectronics can be described as the fabrication of electrical components like transistors, diodes, resistors and capacitors on a semiconductor substrate, mostly silicon, MEMS and MOEMS are using the manufacturing technologies of microelectronics to fabricate mechanical and optical structures as well as sensing or actuating devices. Typical examples are pressure sensors, microphones, acceleration and angular-rate sensors, magnetic compasses, inkjet heads, micro-scanners, micro-fluidic devices, biosensors, etc., to name some. [Pg.474]

See other pages where Fluidic MEMS is mentioned: [Pg.118]    [Pg.118]    [Pg.120]    [Pg.122]    [Pg.124]    [Pg.126]    [Pg.128]    [Pg.130]    [Pg.132]    [Pg.134]    [Pg.184]    [Pg.118]    [Pg.118]    [Pg.120]    [Pg.122]    [Pg.124]    [Pg.126]    [Pg.128]    [Pg.130]    [Pg.132]    [Pg.134]    [Pg.184]    [Pg.31]    [Pg.11]    [Pg.225]    [Pg.87]    [Pg.209]    [Pg.14]    [Pg.360]    [Pg.514]    [Pg.194]    [Pg.322]    [Pg.33]    [Pg.38]    [Pg.33]    [Pg.38]    [Pg.70]    [Pg.483]    [Pg.845]    [Pg.1120]    [Pg.1802]    [Pg.1804]    [Pg.1830]    [Pg.2240]    [Pg.2501]    [Pg.3310]    [Pg.3476]    [Pg.1962]    [Pg.198]    [Pg.2949]    [Pg.140]   


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