FABRICATION AND MATERIALS

Computer chips are categorized by their minimum feature size —the dimension of the smallest feature actually constructed in the manufacturing process. The minimum feature size is continually getting smaller to pack more circuitry into the same space. For example, advanced chips in production in 2000 had minimum feature sizes of 180nm, with chips with a size of 90 nm under development. 

The concept of a minimum feature size is also important in fabrication of microdevices its actual dimensions are determined by the choice of fabrication process. As discussed below, conventional photolithography (405 or 436 nm) is generally limited to features of approximately 1 pm. Deep ultraviolet (UV) (230 to 260 nm) lithography has a minimum feature size of 0.3 pm, and x-ray and e-beam can be used to generate features as small as 0.1pm. 

In this section, the techniques used to manufacture, drill, and seal microdevices are discussed. 

Photolithography is the process of transferring geometric shapes on a mask to the surface of a silicon wafer. It involves 

Ja E 10-1 Significant Papers in Miniaturizatio Relevancfi mihi l llpes  

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The cost of fabrication and material is the same for both the sides and ends, and is S (dollars per unit weight). 

The equipment fabricators and material suppliers must submit ... 

Goodman TD (ed) (2005) Advancements in polymer optics design, fabrication and materials. SPIE (The International Society for Optical Engineering), San Diego, California, USA Grote JG (eds) (2006) Optical materials in defence systems technology IB. Stockholm, Sweden, 13-14 Sept 2006 (sponsored by SPIE Europe published by SPIE - The International Society... 

AR366 1.84 Design and fabrication and materials code case acceptability, ASME Section III. Because... 

Soft Caps Soft caps protect users from sparks, open flames, heat, dust, and molten metal splashes. They contain fire-resistant fabrics and materials. 

Over the past 20 years, the field of molecular encapsulation has grown explosively and is beginning to make important contributions to molecular recognition, catalysis, medicinal chemistry, mechanistic organic chemistry, photochemistry and photophysics, molecular device fabrication, and materials science. Carcerands and hemicarcerands were the... 

Verification of the design, fabrication and materials of items and systems important to the safety of spent fuel storage facilities shall be in accordance with the principles and objectives of Ref. [18] and related Safety Guides. 

Establish competitive bid vendor contracts to identify conceptual designs and materials of construction and have vendors initiate small scale coupon fabrication and testing to identify fabrication and material compatibility issues with a focus on braze fin integrity. Identify accelerated testing to ensure braze base metal compatibility and fin and braze interface strength over mission life. 

M. Hansen, D. Nilsson, D. M. Johansen, S. Balslev, and A. Kristensen, "A nanoimprinted polymo- lab-on-a-chip with integrated optics," presented at Advancements in Polymer Optics Design, Fabrication, and Materials, San Diego, CA, USA, 2005. 

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