Energetic particles

The final common mechanism for creation of energetic particles is ionization in the gas phase with subsequent acceleration to the substrate. Following the preceding discussion, it should not be surprising that the ions formed in the gas will be positive and will result from an energetic collision of another particle with an atom, resulting in knocking an electron off of the atom. Positive ion formation is what creates and 

The other common way in which ions are accelerated toward a growing film is in rf sputtering. Here the glow discharge is the most positively charged portion of the gas. Hence positive ions are pushed out to all of the other surfaces in the system. The details of the formation of electrode potentials that give rise to this phenomenon are 

---

Energetic particles interacting can also modify the structure and/or stimulate chemical processes on a surface. Absorbed particles excite electronic and/or vibrational (phonon) states in the near-surface region. Some surface scientists investigate the fiindamental details of particle-surface interactions, while others are concerned about monitormg the changes to the surface induced by such interactions. Because of the importance of these interactions, the physics involved in both surface analysis and surface modification are discussed in this section. 

The dynamics of ion surface scattering at energies exceeding several hundred electronvolts can be described by a series of binary collision approximations (BCAs) in which only the interaction of one energetic particle with a solid atom is considered at a time [25]. This model is reasonable because the interaction time for the collision is short compared witii the period of phonon frequencies in solids, and the interaction distance is shorter tlian the interatomic distances in solids. The BCA simplifies the many-body interactions between a projectile and solid atoms to a series of two-body collisions of the projectile and individual solid atoms. This can be described with results from the well known two-body central force problem [26]. 

As the kinetic energy involved in the system goes higher, the interaction of energetic particles is more and more localized near the nuclei. When the interaction distance is much smaller than interatomic distances in the system, the BCA is valid ... 

Figure Bl.24.14. A schematic diagram of x-ray generation by energetic particle excitation, (a) A beam of energetic ions is used to eject inner-shell electrons from atoms in a sample, (b) These vacancies are filled by outer-shell electrons and the electrons make a transition in energy in moving from one level to another this energy is released in the fomi of characteristic x-rays, the energy of which identifies that particular atom. The x-rays that are emitted from the sample are measured witli an energy dispersive detector.

Colorimetry, in which a sample absorbs visible light, is one example of a spectroscopic method of analysis. At the end of the nineteenth century, spectroscopy was limited to the absorption, emission, and scattering of visible, ultraviolet, and infrared electromagnetic radiation. During the twentieth century, spectroscopy has been extended to include other forms of electromagnetic radiation (photon spectroscopy), such as X-rays, microwaves, and radio waves, as well as energetic particles (particle spectroscopy), such as electrons and ions. ... 

Fig. 7. Bombardment processes at the surface and in the near-surface region of a sputtering target, where represents the energetic particle used for bombarding the surface <), an adsorbed surface species 0> atoms and x, lattice defects.

Processing variables that affect the properties of the thermal CVD material include the precursor vapors being used, substrate temperature, precursor vapor temperature gradient above substrate, gas flow pattern and velocity, gas composition and pressure, vapor saturation above substrate, diffusion rate through the boundary layer, substrate material, and impurities in the gases. Eor PECVD, plasma uniformity, plasma properties such as ion and electron temperature and densities, and concurrent energetic particle bombardment during deposition are also important. 

Previous studies of the interaction of energetic particles with suri ces have made it clear that under nearly all conditions the majority of atoms or molecules removed from a surface are neutral, rather than charged. This means that the chained component can have large relative fluctuations (orders of magnitude) depending on the local chemical matrix. Calibration with standards for surfaces is difficult and for interfaces is nearly impossible. Therefore, for quantification ease, the majority neutral component of the departing flux must be sampled, and this requires some type of ionization above the sample, often referred to as post-ionization. SALI uses effi-... 

Relative photoionization cross sections for molecules do not vary gready between each other in this wavelength region, and therefore the peak intensities in the raw data approximately correspond to the relative abundances of the molecular species. Improvement in quantification for both photoionizadon methods is straightforward with calibration. Sampling the majority neutral channel means much less stringent requirements for calibrants than that for direct ion production from surfaces by energetic particles this is especially important for the analysis of surfaces, interfaces, and unknown bulk materials. 

When a heavy energetic particle such as an argon ion (typically 1 to 15 keV) hits a surface, it will not be stopped short by the first layer of atoms but continues into the surface until it comes to a halt as a result of energy lost in atomic and electronic scat-... 

Ernest Rutherford observed that the paths taken by energetic particles emitted by radioactive uranium and thorium responded in three ways to magnetic fields slightly bent, strongly bent, and unaffected. He gave them the designations or, fi, and y. Even though scientists soon identified the particles, they still use these names to emphasize that they are nuclear decay products. 

Baskaran and Santschi (1993) examined " Th from six shallow Texas estuaries. They found dissolved residence times ranged from 0.08 to 4.9 days and the total residence time ranged from 0.9 and 7.8 days. They found the Th dissolved and total water column residence times were much shorter in the summer. This was attributed to the more energetic particle resuspension rates during the summer sampling. They also observed an inverse relation between distribution coefficients and particle concentrations, implying that kinetic factors control Th distribution. Baskaran et al. (1993) and Baskaran and Santschi (2002) showed that the residence time of colloidal and particulate " Th residence time in the coastal waters are considerably lower (1.4 days) than those in the surface waters in the shelf and open ocean (9.1 days) of the Western Arctic Ocean (Baskaran et al. 2003). Based on the mass concentrations of colloidal and particulate matter, it was concluded that only a small portion of the colloidal " Th actively participates in Arctic Th cycling (Baskaran et al. 2003). 

---