Anode Magnetrons

Figure 3.12 Comparison of dissociation and ionization glows with and without anode magnetron (a) with anode magnetrons, and (b) without anode magnetrons.

Can the anode magnetron be used in the precleaning process of the metallic substrate that is used as the cathode in the cathodic plasma polymerization In a more broad sense, can the surface of metal (cathode) be cleaned by argon direct current (DC) discharge sputtering ... 

Anode magnetron discharge (C-AM), where a planar cathode without magnetron (C) is used against a magnetron anode (AM). 

Figure 15.2 Schematic view of anode-magnetron DC glow discharge of argon in the interelectrode space, interelectrode distance 102 mm the luminous regions are shown shaded.

Figure 15.3 Effect of anode magnetron on glow, oxygen, flow system.

Comparison of Cathode Magnetron, Anode Magnetron, Nonmagnetron Discharges... 

Figure 15.10 The distribution profile of in the interelectrode space on the center plane in the C-AM mode (anode magnetron) discharge 2 seem, SOmtorr, 10 W, electrode separation distance 76 mm.

Figure 15.12 Electron temperature and electron density as a function of axial distance (from cathode surface) for two radial positions, = 0 and 7 = 4.5 cm, in anode magnetron DC glow discharge of Ar 10 W, 2 seem, SOmtorr, 76 mm electrode distance.

Influence of Magnetic Field Strength of an Anode Magnetron... 

Figure 15.16 Comparison of radial distribution of electron temperature and electron density at 2.5 mm axial position in anode magnetron, cathode magnetron and nonmagnetron DC glow discharge of Ar lOW, 2 seem, SOmtorr, and 240 G (anode and cathode magnetron).

Figure 15.18 Influence of magnetic field strength on axial distribution of electron temperature and electron density, at center radial position, of an anode magnetron DC glow discharge of Ar 800 V, 2 seem, 50 mtorr.

The effects depicted in these figures show the effectiveness of the anode magnetron in sputter cleaning of the cathode surface but also indicate the limitation of the sputter cleaning by means of the anode magnetron. While the treatment of well-defined surface, such as a flat sheet or a moving foil, could be treated efficiently... 

Figure 15.20 Effect of anode magnetron in DC discharge cleaning of the cathode surface by argon discharge 2 seem, SOmtorr, and 76 mm interelectrode distance.

ANODE MAGNETRON FOR CATHODIC POLYMERIZATION 4.1. Effect of Magnetic Field Configuration... 

Figure 15.21 Effect of electrode distance in anode magnetron DC argon cleaning of the cathode CRS plate coated with plasma polymer of TMS, 6.66 Pa (SOmtorr), 180G.

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