SEARCH Articles Figures Tables Addressing beam scanning Confocal scanning-beam laser Confocal scanning-beam laser microscopy Imaging by scanning electron beam Impact of Endstation Design and Beam Scan Mechanism Lithography scanning beam Pinhole , confocal scanning-beam laser Pinhole , confocal scanning-beam laser microscope Scanning beam-specimen Scanning beam-specimen backscattered electrons Scanning beam-specimen interactions Scanning beam-specimen secondary electrons Scanning electron beam systems Scanning electron beams Scanning electron microscopy beam-specimen Interactions Scanning electron-beam lithography Single-stage scanned beam accelerator with a range of accelerating voltages from 80 to 300 kV