Microelectro-mechanical system

Meitl, M. A. et al. 2007. Stress focusing for controlled fracture in microelectro-mechanical systems. Appl. Phys. Lett. 90 083110. 

Trimmer, W., et al. 1995. Injection of DNA into plant and animal tissues with micromechanical piercing structures. Proceedings of the IEEE Microelectro Mechanical Systems Workshop in Amsterdam, 111. 

J. Xie, J. Shih, Y.C. Tai, Integrated surface-micromachined mass flow controller, Proceedings of the 16th IEEE International Conference on MicroElectro Mechanical Systems (MEMS 2003), Kyoto, Japan, 20 (2003). 

H. B. Chan, V. A. Aksyuk, R. N. Kleiman, D. J. Bishop, and F. Capasso, "Quantum mechanical actuation of microelectro mechanical systems by the Casimir force," Science, 291, 1941-4 (2001) "Nonlinear micromechanical Casimir oscillator," Phys. Rev. Lett., 87, 211801 (2001). 

G. Engelmann, O. Ehrmann, J. Simon and H. Reichl, Fabrication of high depth-to-width aspect ratio microstructures. Proceedings, IEEE Microelectro Mechanical Systems, (MEMS 92), Travenmunde, Germany, 1992, pp. 3-98. 

Chemical reaction and mass transfer are two unique phenomena that help define chemical engineering. Chapter 8 described problems involving chemical reaction and mass transfer in a porous catalyst, and how to model chemical reactors when the flow was well defined, as in a plug-flow reactor. Those models, however, did not account for the complicated flow situations sometimes seen in practice, where flow equations must be solved along with the transport equation. Microfluidics is the chemical analog to microelectro-mechanical systems (MEMS), which are small devices with tiny gears, valves, and pumps. The generally accepted definition of microfluidics is flow in channels of size 1 mm or less, and it is essential to include both distributed flow and mass transfer in such devices. 

Griss P, Enoksson P, Tolvanen-Laakso H K, Merilainen P, Ollmar S, Stemme G. 2001. Micromachined electrodes for biopotential measurements./ J Microelectro-mechanical Systems 10,10-16. 

Microelectro Mechanical Systems, Technical Digest, Las Vegas, Nevada, 2002, pp 105-108. 375. 

K. Upadhya and W. P. Hoffman, Advanced composite microtubes for microelectro mechanical systems. Journal of Metals, 46 [5], 54-56 (1994)... 

M. W. Losey, et al.. Design and fabrication of microfluidic devices for multiphase mixing and reaction. Journal of Microelectro-mechanical Systems, 2002, 11, 709-717. 

Radiofrequency (RF) filters in mobile phones (microelectro-mechanical systems MEMS)... 

L. Pellegrino, M. Biasotti, E. Bellingeri, C. Bernini, A. S. Siri, and D. Marre, All-oxide crystalline microelectro mechanical systems Bending the functionalities of transition-metal oxide thin fdms, Adv. Mater., 21, 2377-2381 [2009]. 

Recently Holt et al. [3] developed CNT membranes whose pore sizes were smaller than 2 nm by using a microelectro-mechanical system (MEMS)-compatible fabrication process. 

Poly(vinyl alcohol) is a structure release agent in bioMEMS (microelectro-mechanical systems) microfabrication.The release method offers a simple, cost effective and reliable way to release microfabricated structures that need to be bonded to other structures or are already bonded to them. ... 

Figure 1.27 M-Test structures (cantilever beam, fixed-fixed beam, diaphragm). (Reprinted with permission from Journal of Microelectro-mechanical Systems, M-TEST a test chip for MEMS material property measurement using electrostatically actuated test structures, P.M. Osterberg and S.D. Senturia, 1967 IEEE.)...

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