Spin-coating apparatus

All the fabrication steps were performed in a dust-free environment and under dim red light. The SC film of all-rra 5-/3-carotene was prepared using a spin-coating apparatus fabricated by us. An aliquot (about 20 /u]) ofa chloroform solution of a ]-trans /3-carotene (0.02 M) was spread onto the glass substrate rotating at 2500 rpm, and the solvent was evaporated in air. The film thus fabricated was immediately subjected to optical measurements. 

Solubility of polymers in tetramethyl ammonium hydroxide aqueous solution was measured by dipping the wafer on which the polymer solution was spin-coated, for 1 min. at 25°C. The prebake was carried out at 90°C for 5min. Sensitivity of resists was measured after the exposure with CA 800(Cobilt) or KrF excimer laser(0.9mJ/cm2/1 pulse). The polymer structure was determined by iH-NMR, 13C-NMR(FX90Q apparatus,JEOL) and 2 Si-NMR. The molecular weight distribution was determined with a Toyo Soda Model 801 gel permeation chromatograph at 40°C. The four columns were connected in series, each packed with G-2000H8x3 and G-400H8(Toyo Soda polystylene gel), respectively. 

The PMMA-Phe synthesis, characterization, film preparation, apparatus and experimental scheme are described elsewhere (H) Briefly, the PMMA chains, copolymerized from MMA and Phe-labelled monomers, were characterized via gel permeation chromatography (GPC) M = 411,000, M = 197,000 and M M - 2.08. UV-absoifption measurementsnindicated that ca. I % of all monomer units were Phe-labelled. The sample was dissolved in toluene and was spin-coated onto 1-inch diameter quartz disks. Then, the films (ca. 1 /zm thick) were annealed at 160 C for 60 minutes under vacuum. 

The Step 2 product was spin-coated onto a silicone wafer and baked for 2 minutes at 215°C. Thereafter the anti-reflective mixture was coated with a Keum Ho petroleum photosensitive agent and baked for 90 seconds 110°C. After these processes the material was exposed to a light source by means of ASML/900 scanner apparatus and baked an additional 90 minutes at 130°C. The exposed wafer was developed using an aqueous solution of 2.38% tetramethyl-ammonium hydroxide. 

Typical procedures of the bending beam experiments were as follows. Resin coatings were applied to one side of a clean quartz strip by spin-coating from an appropriate solvent at 2000 to 8000 rpm for about 30 seconds. Coatings were then evaluated for uniformity, and acceptable beams were then inserted into the bending beam apparatus. Stress measurements were taken during temperature ramps and holds. The specific cure schedule followed for each material depended on the manufacturers recommendations or the results of microdielectric cure studies (lfi.). Upon completion of all stress experiments, the beam was removed and the film thickness measured by an Alphastep profilometer. The quartz beams were 82 2 pm thick,... 

Fig. 3.25. Apparatus for the spray-spin coating technique. (Adapted from Abe d, 1987.) 84...

P. Mahneke. Method and apparatus for spin-coating chemicals. US Patent 5916631, assigned to The Fairchild Corporation (Dulles, VA), June 29, 1999. 

Research effort at Albany International Research Co. has developed unit processes necessary for pilot scale production of several species of reverse osmosis hollow fiber composite membranes. These processes include spin-dope preparation, a proprietary apparatus for dry-jet wet-spinning of microporous polysul-fone hollow fibers, coating of these fibers with a variety of permselective materials, bundle winding using multifilament yarns and module assembly. Modules of the membrane identified as Quantro II are in field trial against brackish and seawater feeds. Brackish water rejections of 94+% at a flux of 5-7 gfd at 400 psi have been measured. Seawater rejections of 99+% at 1-2 gfd at 1000 psi have been measured. Membrane use requires sealing of some portion of the fiber bundle for installation in a pressure shell. Much effort has been devoted to identification of potting materials which exhibit satisfactory adhesion to the fiber while... 

The modification of electrodes with PVC membranes has found applicability in ion selective electrode work [99] (so-called "coated wire electrode ). The molecular motion of species within such electrodes has been investigated by Compton and Waller [100]. Using a range of derivatives of the nitroxide spin probe TEMPO, they were able to show how the rotational correlational time was dependent upon the molecular volume of the probe and, by use of variable-temperature apparatus, how this varied with temperature. The effect of various plasticizers upon the molecular motion within the PVC membrane was investigated, rotational correlational times being dependent upon the nature of the plasticizer and the loading level. The effect of loading level upon the correlation time was shown to correlate with data obtained by Compton Maxwell [101] for the response times of K+ ion selective electrodes based upon PVC modified electrodes. 

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