Silicon-glass sandwich

The absorption cell is a glass silicon glass sandwich component (15xlx 0.4 mm) where optical intensities from different colored LEDs are measured by a 64 pixel CCD detector, see also Fig. 25. A demonstrator system with a total system volume of about 50 ml is illustrated in Fig. 26. 

As will be shown, the chosen glass-silicon-glass sandwich construction with the electrical conductors on glass, the areas exposed to the analyte made of silicon or glass, and the use of functional elements simultaneously for different tasks fulfills all the cited demands and, due to their special design, all the necessary subsystems can be generated in one patterning process. 

The total system is evacuated to a pressure of <1 Pa through the sideways open structures in the glass-silicon-glass sandwich. For electrical contact the chip is presently bonded to a PCB, which also serves as vacuum seal. 

Figure 19 shows a cross sectional draft of all the MEMS processes which are necessary to generate the PIMMS. All parts of the mass spectrometer are planar integrated on one chip, i.e., no individual adjustments of the single components are needed. The mechanical composition is a glass-silicon-glass sandwich. For electrical contacts the metals titanium, nickel and gold are used. 

When the run is completed, as judged by the position of the dye markers, the cell is dismantled and the siliconized glass plate removed leaving the gel adhering to the non-siliconized plate. A sheet of used X-ray film is laid on top of the gel, the sandwich inverted and the glass plate removed leaving the gel adhering to the... 

Quartz batting sandwiched between AFRSI quartz and fibrous glass fabric Nylon felt with a silicone rubber FRSI coating Silica tiles, borosilicate glass coating insulation HRSI with silicon boride added... 

In order to guarantee a constant etch rate across the wafer independent of feature size the etching is restricted to narrow gaps around the desired patterns. This allows to remove narrow as well as extended areas of the silicon. The areas to be removed are not bonded to the bottom glass substrate. The released areas are removed afterwards just by turning the sandwich upside down. 

Acetylcholineesterase and choline oxidase The detector consisted of two Pt electrodes (6 mm x 3 mm) sandwiched between Perspex sheets and separated by a 1 mm thick sheet of silicone rubber, and the carrier stream (0.5 mL/min) was 0.1 M phosphate buffer (pH 8.2). AChE and ChO were immobilized by glutraldehyde cross-linking to controlled-pore glass and packed into columns (3 cm x 2.5 mm) that were operated at 25° C. Rectilinear calibration graphs for 10-100 pM choline and acetylcholine were obtained. [104]... 

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