Planar integration

First planar integrated circuits fabricated r Electron beam lithography demonstrated Dry film laminate resist introduced... 

S. M. Mitrovski, L. C. C. Elliott, and R. G. Nuzzo. Microfluidic devices for energy conversion Planar integration and performance of a passive, fully immersed H2-O2 fuel cell. Langmuir 20 (2004) 6974—6976. 

Small mode volumes high Q-factors(10 -10 ) higher-radial-order WG modes are eliminated in the ring resonators suitable for planar integration... 

Figure 19 shows a cross sectional draft of all the MEMS processes which are necessary to generate the PIMMS. All parts of the mass spectrometer are planar integrated on one chip, i.e., no individual adjustments of the single components are needed. The mechanical composition is a glass-silicon-glass sandwich. For electrical contacts the metals titanium, nickel and gold are used. 

Reinhardt M, Quiring G, Ramirez Wong RM, Wehrs H, Muller J (2010) Helium detection using a planar integrated micro-mass spectrometer. International Journal of Mass Spectrometry 295 145-148... 

The planar integrated micro mass spectrometer—one of the new mass spectrometers under development—is also introduced here. Such a portable handheld micro mass spectrometer would be very useful for bedside therapeutic drug monitoring. 

Yin D, Barber JP, Deamer DW, Hawkins AR, Schmidt H (2006) Single-molecule detection sensitivity using planar integrated optics on a chip. Opt Lett 31 2136-2138... 

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