Semiconductor Safety Association

Pyrophoric gases deserve special consideration. Considerable research on storage and use of silane gas has been performed. A summary of some of this research is provided by the Semiconductor Safety Association. ... 

Semiconductor Safety Association. S.SA Journal, vol. 11,. Special issue Silane., Winter 1997. 

Semiconductor Safety Association 8000 Westpark Drive, Suite 130 McLean, VA 22102 Order (703) 790-1745... 

PubSshed quarterly. Subscription is included with membership in the Semiconductor Safety Association non-member annual subscription rate is 50. 

Mr. Bolmen has served asthe Northern California Regional Directorand was on the Board of Directors forthe Semiconductor Safety Association. He also served as the Division Safety DirectorforSemiconductor Equipmentand Materials International from 1986 to 1989. 

David J. EvansI ] of the University of Wisconsin-Stout wrote an article published in the June 1992 SSA Journal (Semiconductor Safety Association) entitled An Examination of the Air Toxics Proposals of the Clean Air Act Amendments and their Effects on the Semiconductor Industry. This article gives an excellent analysis of the potential impact of the Clean Air Act, Title III (hazardous air pollutants) and Title V (permits). Evans identifies potential proactive strategies that a semiconductor facility can adopt to be in a sound position to continue in business. These strategies take into account two significant factors ... 

Personal Coimnunication, Gregory Lund, Hughes Aircraft Company, Carlsbad, California. Materials presented at 1993 Semiconductor Safety Association Conference, Scottsdale, Arizona. 

Rodgers, J. W., Radiation Safety In Semiconductors, Presented at the April 1994 Semiconductor Safety Association Conference in Scottsdale, AZ (Unpublished)... 

Identify previous incidents which have a likely potential for adverse consequences in the workplace. An invaluable reference relating to chemical reactivity and incidents is Bretherick, Handbook of Reactive Chemicals. Additional sources of information about semiconductor process hazards are the Semiconductor Industry Association (SIA) and Semiconductor Safety Association (SSA). The SSA in particular provides a forum in which companies and universities can discuss accidents, incidents, and process safety issues. 

Most CGA valves are provided with a restricted flow orifice (RFO). The restricted flow orifice is the most important contribution to silane safety. It will reduce an unrestricted orifice to a maximum orifice size ranging from 0.006 inches to 0.015 inches. It is desirable to limit the flow to 30 liters per minute. With silane, some process engineers argue that these orifices clog. At the 1990 Semiconductor Safety Association Conference, a semiconductor manufacturer indicated they recorded 1600 points without a single incident of clogging. The use of die restricted flow orifices with... 

Figure 3. Paper-tape detector head schematic. (Reprinted with permission from the Semiconductor Safety Association and MDA.)...

Figure 7. Diagram of a Fourier Transform infrared spectrometer (FTIR). (Reprinted with permission from die Semiconductor Safety Association)...

Figure 12. Potential locations for gas detectors based on gas vapor density and physical area characteristics. Gas density lighter than air in (a) stiU air, and in (b) moving air. Gas density heavier than air in (c) still air, and in (d) moving air. (e) In a typical cleanroom, the sensor should be located at the return filter wall, so it samples aU air passing by during circulation, (filna ventilated gas cabinet, the sensor should be placed in the exhaust duct (Figures 12a-12d reprinted by permission. Copyright 1981, Instrument Society of America.. From ISA Transactions, 20(2). Figures 12e and 12f reprinted with permission from the Semiconductor Safety Association.)...

Beginning in 1982, the primary trade association ofthe U.S. semiconductor industry (Semiconductor Industry Association—SIA) has sponsored the development and maintenanee ofthe Occupational Health System (OHS). This system provides detailed data analyses of pertinent work injury and illness ease variables on an armual basis for the semieonduetor industry. Approximately one-quarterto one-third ofthe U.S. semieonduetor industry partieipates in the OHS program on a year-to-year basis. Priorto 1982, the only signifieant data eoneeming the safety and health experience of the nation s semiconductor work force were those published annually in the BLS surveys, as diseussed above. 

Figure 1. Environment, safety, and health technology focus areas. (Semiconductor Industry Association.)...

International Titanium Association, The (ITA), safety committee of, 24 865 International Technical Roadmap for Semiconductors (ITRS), 75 181 International temperature scales (ITS), 75 749 24 436... 

The primary factor in determining a production programs survival is its overhead. Because of the high costs of reactants and toxic handling in compound semiconductor production, the overhead is often determined, in large part, by the cost associated with system operation and maintenance. These costs include facilitization (including clean rooms, gas enclosures and other safety-related constructions), system amortization consumables such as reactants, wafers, chemicals, and filters, waste handling, and safety compliance. 

Lunch at SESHA (Semiconductor Environmental, Safety, and Health Association) 24th Annual Symposium, April 4-6, 2002, Palm Springs, California. 

Some of these strippers suffered from one or more drawbacks such as potential toxicity to workers exposed to them, environmental and pollution problems in disposal after use, volatility, corrosion of equipment, and the safety hazard of operating at temperatures above the flash point of the stripper. They were also plagued by difficulties and the high cost associated with disposing of them in an environmentally acceptable manner after use. The semiconductor industry has to a large extent migrated away from them for the aforementioned reasons, and some of the chlorinated resist strippers such as chloroform are now banned from the semiconductor industry. 

Chapter 6, Radiation Safety, again teams up co-authors David Baldwin and Michael Williams. In this chapter, we are offered a comprehensive review of the various classifications and associated hazards of radiation as well as potential sources and specific radiation exposures in a cleanroom environment. Included in this chapter are industrial hygiene identification, monitoring and control practices specific to semiconductor processes and equipment. 

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