Semiconductor Safety

Pyrophoric gases deserve special consideration. Considerable research on storage and use of silane gas has been performed. A summary of some of this research is provided by the Semiconductor Safety Association. ... 

Semiconductor Safety Association. S.SA Journal, vol. 11,. Special issue Silane., Winter 1997. 

Hall, A.H., Blomet, J., Gross, M., Nehles, J. Hexafluorine for emergency decontamination of hydrofluoric acid eye/skin splashes. Semiconductor Safety Assoc J 14, 30-33 (2000)... 

Semiconductor Safety Association 8000 Westpark Drive, Suite 130 McLean, VA 22102 Order (703) 790-1745... 

PubSshed quarterly. Subscription is included with membership in the Semiconductor Safety Association non-member annual subscription rate is 50. 

Semiconductor safety handbook safety and health in the semiconductor industry / edited by Richard A. Bolmen, Jr. p. cm. 

Mr. Bolmen has served asthe Northern California Regional Directorand was on the Board of Directors forthe Semiconductor Safety Association. He also served as the Division Safety DirectorforSemiconductor Equipmentand Materials International from 1986 to 1989. 

SEMICONDUCTOR SAFETY HANDBOOK edited by Richard A. Bolmen, Jr. 

We have attempted to eonstruct a lefeienee manual that is comprehensive in its coverage of the teehnieal aspeets of each individual subject, while at the same time addressing practical applications of each topic. The scope of this text, from its inception, was intended to address signifieantly more than what would typically be classified under the definition of safety. However, we felt that all of ihe chapters have a direct application to the protection and preservation of semiconductor employees, the surrounding communities and the environment. As such, The Semiconductor Safety Handbook - Safety and Health in the Semiconductor Industry seemed an appropriate title. 

The purpose of the Semiconductor Safety Handbook has been to provide a comprehensive, hands-on reference to environmental, health and safety issues critical to the semiconductor industry. It was also our intent to produce a text that provides a practical user s guide for semiconductor environmental, health and safety practitioners as well as those individuals responsible for operation, maintenance and production in wafer fabrication facilities. It is ourbeliefthatthe contributions ofthese authors have achieved that goal and we hope that you find the Semiconductor Safety Handbook a useful addition to your library. 

The objectives ofthis chapter ofihe Semiconductor Safety Handbook are to provide the reader with background and to suggest approaches that can assist in developing, implementing, and managing effective environmental compliance programs for a wide range of semiconductor facilities and operations. 

David J. EvansI ] of the University of Wisconsin-Stout wrote an article published in the June 1992 SSA Journal (Semiconductor Safety Association) entitled An Examination of the Air Toxics Proposals of the Clean Air Act Amendments and their Effects on the Semiconductor Industry. This article gives an excellent analysis of the potential impact of the Clean Air Act, Title III (hazardous air pollutants) and Title V (permits). Evans identifies potential proactive strategies that a semiconductor facility can adopt to be in a sound position to continue in business. These strategies take into account two significant factors ... 

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