Semiconductor Equipment and Materials

Standards for food-grade chemicals in the United States are set by the Committee on Eood Chemicals Codex of the National Academy of Sciences (NAS) which pubHshes them in the Food Chemicals Codex (ECC) (6) (see also Eood additives). Standards for laboratory reagents are set by the American Chemical Society (ACS) Committee on Analytical Reagents and are pubHshed in Feagent Chemicals—A.CS Specifications (7). Standards for electronic-grade chemicals, which have extremely low limits for trace ions, are pubHshed aimually in The Book of SEMI Standards (BOSS) by Semiconductor Equipment and Materials International (SEMI) (8). 

In 1973 the Semiconductor Equipment and Materials Institute (SEMI) held its first standards meeting. SEMI standards are voluntary consensus specifications developed by the producers, users, and general interest groups in the semiconductor (qv) industry. Examples of electronic chemicals are glacial acetic acid [64-19-7] acetone [67-64-17, ammonium fluoride [12125-01 -8] and ammonium hydroxide [1336-21 -6] (see Ammonium compounds), dichloromethane [75-09-2] (see Cm.OROCARBONSANDcm.OROHYDROCARBONs), hydrofluoric acid [7664-39-3] (see Eluorine compounds, inorganic), 30% hydrogen peroxide (qv) [7722-84-1] methanol (qv) [67-56-1] nitric acid (qv) [7697-37-2] 2-propanoI [67-63-0] (see Propyl alcohols), sulfuric acid [7664-93-9] tetrachloroethane [127-18-4] toluene (qv) [108-88-3] and xylenes (qv) (see also Electronic materials). 

The Book ofiSEMI Standards, Semiconductor Equipment and Materials International, Mountain View, Calif., 1993. 

Semiconductor Equipment and Materials International, SEMI Standards E 45. 

There has been considerable interest in the determination of ions at trace levels as, for example, in applications need high-purity water as in semiconductor processing and the determination of trace anions in amine treated waters. For this investigation, we will define "trace" as determinations at or below 1 pg/1 (ppb) levels. The Semiconductor Equipment and Materials International (SEMI) recommended the use of IC for tracking trace ionic contaminants from 0.025 to 0.5 pg/1 [18]. In addition, the Electric Power Research Institute (EPRI) has established IC as the analytical technique for determining of trace level concentrations of sodium, chloride and sulfate down to 0.25 pg/1 in power plant water [19]. 

Semiautonomous organizational units, 315-317 Semiconductor Equipment and Materials... 

Semiconductor Equipment and Materials International (2009) SEMI international standards products, http // www.semi.org/en/Store/Standards/... 

Water is the solvent that probably has the greatest number of documented grades of specifications. These include ACS (American Chemical Society), USP (United States Pharmacopoeia), ASTM (American Society for Testing and Materials), and SEMI (Semiconductor Equipment and Materials Institute) specifications as well as more general specifications such as pyrogen-free. It is critical to ensure that the water used in a method meets the specifications demanded by the method. Since many of these organizations include tests that are non-standard with respect to high-purity HPLC solvent manufacturers, it is important to contact the manufacturer whenever it is unclear whether or not their water is suitable for the intended use. 

SEMI S2-0706. Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. San Jose, CA Semiconductor Equipment and Materials International, 2006. (Related Information 1—Equipment/Product Safety Program is an adjunct to these guidelines.)... 

Semiconductor Equipment and Materials International (SEMI) (2005) SEMI Standards, SEMI C41-0705 Specifications and Guidelines for 2-Propanol. Semiconductor Equipment and Materials International (SEMI), San Jose, CA, USA. 

Ion chromatography offers an efficient method for analyzing ionic species for the production of semiconductor components and printed circuit boards. Conventional methods based on the SEMI (Semiconductor Equipment and Materials Institute, Inc.) regulations for identifying and quantifying ionic species responsible for corrosion are labor-intensive and time-consuming, whereas it is... 

Boron trichloride is also available in ultra high purity grades for use in the electronics industry. Gas purity guidelines have been developed and published by the Semiconductor Equipment and Materials International and can be found in the Book of SEMI Standards [1]. 

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