Semiconductor Equipment and Materials International

Standards for food-grade chemicals in the United States are set by the Committee on Eood Chemicals Codex of the National Academy of Sciences (NAS) which pubHshes them in the Food Chemicals Codex (ECC) (6) (see also Eood additives). Standards for laboratory reagents are set by the American Chemical Society (ACS) Committee on Analytical Reagents and are pubHshed in Feagent Chemicals—A.CS Specifications (7). Standards for electronic-grade chemicals, which have extremely low limits for trace ions, are pubHshed aimually in The Book of SEMI Standards (BOSS) by Semiconductor Equipment and Materials International (SEMI) (8). 

The Book ofiSEMI Standards, Semiconductor Equipment and Materials International, Mountain View, Calif., 1993. 

Semiconductor Equipment and Materials International, SEMI Standards E 45. 

There has been considerable interest in the determination of ions at trace levels as, for example, in applications need high-purity water as in semiconductor processing and the determination of trace anions in amine treated waters. For this investigation, we will define "trace" as determinations at or below 1 pg/1 (ppb) levels. The Semiconductor Equipment and Materials International (SEMI) recommended the use of IC for tracking trace ionic contaminants from 0.025 to 0.5 pg/1 [18]. In addition, the Electric Power Research Institute (EPRI) has established IC as the analytical technique for determining of trace level concentrations of sodium, chloride and sulfate down to 0.25 pg/1 in power plant water [19]. 

Semiconductor Equipment and Materials International (2009) SEMI international standards products, http // www.semi.org/en/Store/Standards/... 

SEMI S2-0706. Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. San Jose, CA Semiconductor Equipment and Materials International, 2006. (Related Information 1—Equipment/Product Safety Program is an adjunct to these guidelines.)... 

Semiconductor Equipment and Materials International (SEMI) (2005) SEMI Standards, SEMI C41-0705 Specifications and Guidelines for 2-Propanol. Semiconductor Equipment and Materials International (SEMI), San Jose, CA, USA. 

Boron trichloride is also available in ultra high purity grades for use in the electronics industry. Gas purity guidelines have been developed and published by the Semiconductor Equipment and Materials International and can be found in the Book of SEMI Standards [1]. 

For semiconductor applications, anhydrous hydrogen chloride is available in an electronic grade specified by the Semiconductor Equipment and Materials International (SEMI) with a minimum purity of 99.9944 percent with the following specifications for impurities [1]... 

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