Scanning sample preparation

Electron Beam Techniques. One of the most powerful tools in VLSI technology is the scanning electron microscope (sem) (see Microscopy). A sem is typically used in three modes secondary electron detection, back-scattered electron detection, and x-ray fluorescence (xrf). AH three techniques can be used for nondestmctive analysis of a VLSI wafer, where the sample does not have to be destroyed for sample preparation or by analysis, if the sem is equipped to accept large wafer-sized samples and the electron beam is used at low (ca 1 keV) energy to preserve the functional integrity of the circuitry. Samples that do not diffuse the charge produced by the electron beam, such as insulators, require special sample preparation. 

Temperature-risiag elution fractionation (tref) is a technique for obtaining fractions based on short-chain branch content versus molecular weight (96). On account of the more than four days of sample preparation required, stepwise isothermal segregation (97) and solvated thermal analysis fractionation (98) techniques usiag variatioas of differeatial scanning calorimetry (dsc) techniques have been developed. 

Most of the transition elements that are of primary interest in the semiconductor industry such as Fe, Cr, Mn, Co, and Ni, can be analyzed with very low detection limits. Second to its sensitivity, the most important advantage of NAA is the minimal sample preparation that is required, eliminating the likelihood of contamination due to handling. Quantitative values can be obtained and a precision of 1-5% relative is regularly achieved. Since the technique measures many elements simultaneously, NAA is used to scan for impurities conveniently. 

The STM uses this eflFect to obtain a measurement of the surface by raster scanning over the sample in a manner similar to AFM while measuring the tunneling current. The probe tip is typically a few tenths of a nanometer from the sample. Individual atoms and atomic-scale surface structure can be measured in a field size that is usually less than 1 pm x 1 pm, but field sizes of 10 pm x 10 pm can also be imaged. STM can provide better resolution than AFM. Conductive samples are required, but insulators can be analyzed if coated with a conductive layer. No other sample preparation is required. 

Scanning electron microscopy and replication techniques provide information concerning the outer surfaces of the sample only. Accurate electron microprobe analyses require smooth surfaces. To use these techniques profitably, it is therefore necessary to incorporate these requirements into the experimental design, since the interfaces of interest are often below the external particle boundary. To investigate the zones of interest, two general approaches to sample preparation have been used. 

The authors wish to acknowledge the work of Paul McCarthy in scanning electron microscopy, Michael Saculla in x-ray radiography, and Steven Buckley and Chuck Chen in sample preparation and modulus measurement. This work was performed under the auspices of the U.S. Department of Energy by the Lawrence Livermore National Laboratory under Contract No. W-7405-ENG-48. 

First of all, only the samples, prepared according to the procedure (a) were suitable for scanning electron microscope (SEM) measurements. All other samples were very un-... 

Figure 1 shows narrow range high resolution scans of the molecular ion region of NDMA, recorded near the maximum of the GC peaks, present in one of the beer samples prepared in the AOAC collaborative study. The peak at m/z 74.0480 represents approximately 0.15 ng of NDMA injected on the column, corresponding to a concentration of 0.6 yg/kg of beer. Use of high resolution MS permitted confirmation of the identity and amount of nitrosamine without additional cleanup of the concentrate prepared by the AOAC method. Sample quantity requirements were comparable to those of the TEA. 

This technique can be applied to samples prepared for study by scanning electron microscopy (SEM). When subject to impact by electrons, atoms emit characteristic X-ray line spectra, which are almost completely independent of the physical or chemical state of the specimen (Reed, 1973). To analyse samples, they are prepared as required for SEM, that is they are mounted on an appropriate holder, sputter coated to provide an electrically conductive surface, generally using gold, and then examined under high vacuum. The electron beam is focussed to impinge upon a selected spot on the surface of the specimen and the resulting X-ray spectrum is analysed. 

Sample preparation for AFM analysis is relatively simple. Generally, a desired amount of sample is absorbed onto a smooth and clean substrate surface, for example, a freshly cleaved mica surface. For example, to prepare a food macromolecule sample for AFM imaging in air, the diluted macromolecule solution is disrupted by vortexing. Then, a small aliquot (tens of microliters) of vortexed solution is deposited onto a surface of freshly cleaved mica sheet by pipette. The mica surface is air dried before the AFM scan. A clean surrounding is required to avoid the interference of dust in the air. Molecular combing or fluid fixation may be applied to manipulate the molecule to get more information. 

Figure 8.3 Positive ion LD TOF mass spectrum of blood from a P. vivax infected human patient (only asexual parasites have been observed by microscopy estimated parasitemia approximately 72 parasites/pl). Protocol C is used for sample preparation estimated number of parasites deposited per well is approximately 90. A commercial TOF system is used laser wavelength 337 nm. All one hundred single laser shot spectra, obtained from hnear scanning of an individual well, are averaged (no data smoothing). The characteristic fingerprint ions of detected heme are denoted.

Today, structure evolution can be tracked in-situ with a cycle time of less than a second. Moreover, if a polymer part is scanned by the X-ray beam of a microbeam setup, the variation of structure and orientation can be documented with a spatial resolution of 1 pm. For the application of X-rays no special sample preparation is required, and as the beam may travel through air for at least several centimeters, manufacturing or ageing machinery can be integrated in the beamline with ease. 

Solid-state NMR spectroscopy was also used to examine the post reaction behavior of pTrMPTrA samples prepared in bulk as thin films, as described in the experimental. All of the spectra in this aging study required a minimum of 720 scans on approximately 50 mg of sample with a 100 s pulse delay to achieve adequate signal/noise. Under these conditions, reliable peak areas could be obtained from the curve fits of the carbonyl region. Figure 3 depicts the evolution of the solid state spectrum of the sample stored under N2 over time and upon heating. The area of the peak at 174 ppm for the carbonyl adjacent to the reacted double bond increases as the peak at 166 ppm for pendant unsaturation decreases. The results of the aging study are given in Table I. 

As a consequence of the development of extraction methods for STA based on mixed-mode SPE columns, as well as of the recent introduction of instruments for the automated sample preparation allowing efficient evaporation and derivatization of the extracts, full automation of STA methods based on GC-MS analysis is also available. It needs GC-MS instalments equipped with an HP PrepStation System. The samples directly injected by the PrepStation are analyzed by full scan GC-MS. Using macrocommands, peak identification and reporting of the results are also automated. Each ion of interest is automatically selected, retention time is calculated, and the peak area is determined. All data are checked for interference, peak selection, and baseline determination. 

In addition to possible variations between methods, there may also be variations in Tg within a method, depending on the measurement protocol employed. For example, the DCS Tg midpoint for a quench-cooled ( 100 K/min) maltose sample, heated at a scanning rate of lOK/min, was 43.1 0.21 °C, whereas for a maltose sample prepared using equal heating and cooling rates of lOK/min the Tg was 41.2 0.10°C (Schmidt and Lammert, 1996). For the same samples, DSC Tg Active temperatures were also calculated. Tg Active for the quench-cooled sample was 41.0 0.20 °C, whereas for the equal-rate sample, Tg Active was 38.6 0.06 °C. 

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