Rutherford backscattering spectroscopy thin films

Sample preparation. Thin films of PBTMSS for Rutherford backscattering spectroscopy (RBS) and general plasma etching studies were spun on polished silicon wafers from a 3.5% solution in chlorobenzene using a photoresist spinner. The films were baked for 10 to 20 min. at 105-120 X in air. PBTMSS films for Auger electron spectroscopy (AES) studies were spin-coated on silicon wafers previously coated with 2000 A of gold. Films for IR studies were spin-coated onto NaCl plates. [Pg.335]

RBS Rutherford Backscattering Spectroscopy Quantitative thin film composition and thickness Backscattered He atoms 0.001-10at% 20-200A 2mm... [Pg.152]

In addition to these characterization tools, surface analytical techniques such as surface matrix-assisted laser desorption ionization (Surface MALDI) mass spectrometry, Rutherford backscattering spectroscopy (RBS), and near-edge X-ray absorption fine stmcture spectroscopy (NEXAFS) are used to obtain structural and chemical details about surface thin films. Surface MALDI, also known as MALDI-ToF MS (see Section 5.4.2), offers high mass resolution for analyzing surface films and molecular layers using the m/z of various ions generated from the sample surface (mixed with an... [Pg.101]

The heating rate of the thermal annealing used for the crystallization of the amorphous layer has a strong effect on the heterostructural characteristics of the crystalline film and therefore on the electrical properties. Figure 27.13 shows the Rutherford backscattering spectroscopy (RBS) spectra of two (Ca, Pb)Ti03 perovskite thin films prepared from the same precursor solution, but annealed at 650 °C with a relatively slow ( 8°Cs ) and a rapid ( 30°Cs ) heating rate. [Pg.863]

Various methods of analyzing surfaces for chanical composition and physical texture. Electron spectroscopy for chemical analysis and Auger analysis [19] are techniqnes that have been used to identily chemical species in thin films. In Rutherford backscattering spectrometry incident He ions are scattered elastically by nuclei. The energy spectrum thus obtained can... [Pg.742]