Quantitative Rutherford backscattering spectroscopy

RBS Rutherford Backscattering Spectroscopy Quantitative thin film composition and thickness Backscattered He atoms 0.001-10at% 20-200A 2mm... 

Quantitative analysis by XPS of the first-row transition metal nitrides ScN(OOl), TiN(OOl), VN(OOl), and CrN(OOl) grown and analyzed in situ is shown in Table 3.4 [12-15, 24—27]. The data show compositions of these films to be quite similar to bulk compositions measured by Rutherford backscattering spectroscopy (RBS). Because XPS is an extremely surface sensitive technique, analyzing as little as the top 10 nm of a sample, the composition of the surface is in most cases altered by exposure to air demonstrating an advantage of being able to do in situ growth/ analysis. This will be discussed in more detail in Sect. 3.14. 

Within the last 5—10 years PIXE, using protons and helium ions, has matured into a well-developed analysis technique with a variety of modes of operation. PIXE can provide quantitative, nondestructive, and fast analysis of essentially all elements. It is an ideal complement to other techniques (e.g., Rutherford backscattering) that are based on the spectroscopy of particles emitted during the interaction of MeV ion beams with the surface regions of materials, because... 

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