Rutherford backscattering measurements

Rutherford backscattering spectrometry is the measurement of the energies of ions scattered back from the surface and the outer microns (1 micron = 1 pm) of a sample. Typically, helium ions with energies around 2 MeV are used and the sample is a metal coated silicon wafer that has been ion implanted with about a... 

By inserting a semiconductor x-ray detector into the analysis chamber, one can measure particle induced x-rays. The cross section for particle induced x-ray emission (PIXE) is much greater than that for Rutherford backscattering and PIXE is a fast and convenient method for measuring the identity of atomic species within... 

The use of nuclear techniques allows the determination of C, N, H, O, and heavier contaminants relative fractions with great accuracy, and of the elements depth profile with moderate resolution (typically 10 nm). Rutherford backscattering spectroscopy (RBS) of light ions (like alpha particles) is used for the determination of carbon and heavier elements. Hydrogen contents are measured by forward scattering of protons by incident alpha particles (ERDA) elastic recoil detection analysis [44,47]. 

Figure 7. Carbon and oxygen content of 0.12 nm palladium acetate film, measured by Rutherford backscattering spectroscopy, as a function of 2 MeV He+ ion dose.

Ti content in the polymer films was measured with a Princeton Gamma Tech System 4 x-ray Fluorescence Spectrometer. The conditions employed were Cr target, 50 keV source operating at 3 mA, 0.75 mm aperture, 4.8 mm beam stop, helium atmosphere and 100 sec. counting time. A calibration curve was constructed by plotting the fluorescence counts versus the amount of Ti in HB-HPR 206 films determined by Rutherford Backscattering Spectroscopic (RBS) analysis. 

Rutherford backscattering spectrometry spect A method of determining the concentrations of various elements as a function of depth beneath the surface of a sample, by measuring the energy spectrum of ions which are backscattered out of a beam directed at the surface. roth-or-ford bak,skad-3-rir spek tram-o-tre rutherfordium chem A chemical element, symbolized Rf, atomic number 104, a synthetic element the first element beyond the actinide series, and the twelfth transuranium element., r3lh 3t fdr-de-3m ... 

After the experiment, the experimental charge is prepared for analysis of the diffusion component or species. The analytical methods include microbeam methods such as electron microprobe, ion microprobe, Rutherford backscatter-ing, and infrared microscope to measure the concentration profile, as well as bulk methods (such as mass spectrometry, infrared spectrometry, or weighing) to determine the total gain or loss of the diffusion component or species. Often, the analysis of the diffusion profile is the most difficult step in obtaining diffusivity. 

Rutherford backscattering is an important method for determining the composition and structure of surfaces and thin films. In Figure 13.8, we show the results of an RBS measurement with 2.0-MeV 4He incident on an Si surface with a Co impurity that was diffused into the bulk material. One can clearly detect the Co and its depth profile. 

Blends of this copolymer with polystyrene were analysed by contact angle measurements and Rutherford backscattering (RBS) both of which showed that the surface was silicone rich. 

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