Poly thick

FIGURE 14.8 Simulation of angular rate sensor drive and sense frequencies versus EPI-poly thickness. Spedlications of the g5TO can only be fulfilled for A/= 300 125 Hz that is, EPI-poly thickness after CMP has to be 11.0 0.27 rm. 

The CMP task is a so-called blind polish process that is, the process has to be terminated at a given thickness. In our case, it is assumed that the EPI-poly thickness is repeatable from wafer to wafer. The polishing time is determined with control wafers and preset. Every wafer of a production batch is measured after CMP. If the thickness results run out of spec, the polishing time has to be adjusted for the following wafer (closed-loop control). By combining uniformity profiles of EPI-poly deposition and poly-Si CMP, sensor structures with a final thickness of 11.0 pm and an absolute thickness distribution of 80nm (Icr) are obtainable. The optimized CMP process itself shows a nonuniformity of <2% on 150-mm wafers. 

When dealing with esters of water-soluble, non steam-volatile, poly-hydric alcohols e.g., ethylene glycol or glycerol), the distillate consists of water only (density 1 00). The water soluble, non-volatile alcohol may be isolated by evaporation of the alkahne solution to a thick syrup on a water bath and extraction of the polyhydric alcohol from the salt with cold ethyl alcohol. 

The beater additive process starts with a very dilute aqueous slurry of fibrous nitrocellulose, kraft process woodpulp, and a stabilizer such as diphenylamine in a felting tank. A solution of resin such as poly(vinyl acetate) is added to the slurry of these components. The next step, felting, involves use of a fine metal screen in the shape of the inner dimensions of the final molded part. The screen is lowered into the slurry. A vacuum is appHed which causes the fibrous materials to be deposited on the form. The form is pulled out after a required thickness of felt is deposited, and the wet, low density felt removed from the form. The felt is then molded in a matched metal mold by the appHcation of heat and pressure which serves to remove moisture, set the resin, and press the fibers into near final shape (180—182). 

Poly(vinyl fluoride) is available from Du Pont both as a resia and as transparent and pigmented films under the trademark Tedlar PVF film. Films are available ia nonoriented and oriented grade ia several tensile modifications and thicknesses, with either adherable or nonadherable release-grade surfaces. The 1992 prices ranged from 30 to 70/kg, vs 24 to 62/kg ia 1988. Prices for specially tailored films were significantly higher. 

Letterpress. This is the oldest printing process stiU in use. It continues to be replaced by newer printing processes. Printing is conducted from a raised image area of the printing plate. Inks in the printing process are transferred directly from a raised area to a substrate. The printing plates contain a thick layer of photopolymer (often a mixture with polymer such as poly(vinyl alcohol) deposited over a plastic or aluminum base. 

When the process medium is electrically conductive (dielectric values > 10), the capacitor developed above does not work the iasulatiag material needed between the two conductive plates is lost. The conductive Hquid surrounding the probe acts as a short circuit to the tank wall (second plate of the capacitor). To reestabUsh the dielectric (iasulatiag material), the probe can be iasulated with a nonconductive material such as tetrafluoroethylene (TFE), poly(vinyhdene fluoride) (PVDF), poly(vinyl chloride) (PVC), etc. The capacitor exists between the probe rod, through the thickness of the iasulation (dielectric), to the conductive Hquid which is now acting as the second plate of the capacitor, or ground reference (Fig. 9). 

AppHcation of an adhesion-promoting paint before metal spraying improves the coating. Color-coded paints, which indicate compatibiHty with specific plastics, can be appHed at 20 times the rate of grit blasting, typically at 0.025-mm dry film thickness. The main test and control method is cross-hatch adhesion. Among the most common plastics coated with such paints are polycarbonate, poly(phenylene ether), polystyrene, ABS, poly(vinyl chloride), polyethylene, polyester, and polyetherimide. 

Table 4. Electrical Properties of 6.35-mm Thick Poly(methyl methacrylate) Sheet ...

Denture Adhesives. Fast hydration and gel-forming properties are ideally mated to produce a thick, cushioning fluid between the dentures and gums (100). The biologically inert nature of poly(ethylene oxide) helps reduce unpleasant odors and taste in this type of personal-care product (see... 

CPA. Copolymer alloy membranes (CPAs) are made by alloying high molecular weight polymeries, plasticizers, special stabilizers, biocides, and antioxidants with poly(vinyl chloride) (PVC). The membrane is typically reinforced with polyester and comes in finished thicknesses of 0.75—1.5 mm and widths of 1.5—1.8 m. The primary installation method is mechanically fastened, but some fully adhered systems are also possible. The CPA membranes can exhibit long-term flexibiHty by alleviating migration of the polymeric plasticizers, and are chemically resistant and compatible with many oils and greases, animal fats, asphalt, and coal-tar pitch. The physical characteristics of a CPA membrane have been described (15). 

PVC. Poly(vinyl chloride) (PVC), a very versatile polymer, is manufactured by the polymerisation of vinyl chloride monomer, a gaseous substance obtained from the reaction of ethylene with oxygen and hydrochloric acid. In its most basic form, the resin is a relatively hard material that requites the addition of other compounds, commonly plasticisers and stabilisers as well as certain other ingredients, to produce the desired physical properties for roofing use. The membranes come in both reinforced and nonreinforced constmctions, but since the 1980s the direction has been toward offering only reinforced membranes. The membrane thickness typically mns from 0.8—1.5 mm and widths typically in the range of 1.5—4.6 m. 

Heat-SensitiZingProcess. Another process used to make latex mbber articles of thicker section involves sensitizing the compound so that it coagulates when heated to a given temperature, then using heated molds to build the article to the desired thickness. Ammonia-preserved latex is used in this process, and polyether, polythioether, or poly(vinyl methyl ether) (PVME) can be used as heat-sensitizing agents. 

In the suspension polymerization of PVC, droplets of monomer 30—150 p.m in diameter are dispersed in water by agitation. A thin membrane is formed at the water—monomer interface by dispersants such as poly(vinyl alcohol) or methyl cellulose. This membrane, isolated by dissolving the PVC in tetrahydrofuran and measured at 0.01—0.02-p.m thick, has been found to be a graft copolymer of polyvinyl chloride and poly(vinyl alcohol) (4,5). Early in the polymerization, particles of PVC deposit onto the membrane from both the monomer and the water sides, forming a skin 0.5—5-p.m thick that can be observed on grains sectioned after polymerization (4,6). Primary particles, 1 p.m in diameter, deposit onto the membrane from the monomer side (Pig. 1), whereas water-phase polymer, 0.1 p.m in diameter, deposits onto the skin from the water side of the membrane (Pig. 2) (4). These domain-sized water-phase particles may be one source of the observed domain stmcture (7). 

Fig. 4.55. Experimental and calculated (dashed line) RAIR-spectra for poly(methyl methacrylate) films 3270 + 100 nm, 362 30 nm, and 78 + 15 nm thick (a) p-polarized light incident at 60° (b) s-polarized light incident at 60°, after [4.266].

Figure 12.18 LC-SFC analysis of mono- and di-laurates of poly (ethylene glycol) ( = 10) in a surfactant sample (a) normal phase HPLC trace (b) chromatogram obtained without prior fractionation (c) chromatogram of fraction 1 (FI) (d) chromatogram of fraction 2 (F2). LC conditions column (20 cm X 0.25 cm i.d.) packed with Shimpak diol mobile phase, w-hexane/methylene chloride/ethanol (75/25/1) flow rate, 4 p.L/min UV detection at 220 nm. SFC conditions fused-silica capillary column (15 m X 0.1 mm i.d.) with OV-17 (0.25 p.m film thickness) Pressure-programmed at a rate of 10 atm/min from 80 atm to 150 atm, and then at arate of 5 atm/min FID detection. Reprinted with permission from Ref. (23).

Another application of SFC-GC was for the isolation of chrysene, a poly aromatic hydrocarbon, from a complex liquid hydrocarbon industrial sample (24). A 5 p.m octadecyl column (200 cm X 4.6 mm i.d.) was used for the preseparation, followed by GC analysis on an SE-54 column (25 m X 0.2 mm i.d., 0.33 p.m film thickness). The direct analysis of whole samples transferred from the supercritical fluid chromatograph and selective and multi-heart-cutting of a particular region as it elutes from the SFC system was demonstrated. The heart-cutting technique allows the possibility of separating a trace component from a complex mixture (Figure 12.21). 

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