Plasma oxidation

After image transfer, the patterned resist must be readily and completely removable without substrate damage. The pattern often can be stripped from the substrate with a mild organic solvent. Proprietary stripper formulations or plasma oxidation treatments are utilized when the imaging chemistry or image transfer process has iasolubilized the pattern. 

Sihcon dioxide layers can be formed using any of several techniques, including thermal oxidation of siUcon, wet anodization, CVD, or plasma oxidation. Thermal oxidation is the dominant procedure used in IC fabrication. The oxidation process selected depends on the thickness and properties of the desired oxide layer. Thin oxides are formed in dry oxygen, whereas thick (>0.5 jim) oxide layers are formed in a water vapor atmosphere (13). 

Chemical Analysis. Plasma oxidation and other reactions often are used to prepare samples for analysis by either wet or dry methods. Plasma excitation is commonly used with atomic emission or absorption spectroscopy for quaUtative and quantitative spectrochemical analysis (86—88). 

She et al. [128] used rolling contact to estimate the adhesion hysteresis at polymer/oxide interfaces. By plasma oxidation of the cylinders of crosslinked PDMS, silica-like surfaces were generated which could hydrogen bond to PDMS r olecules. In contrast to unmodified surfaces, the adhesion hysteresis was shown to be larger and proportional to the molecular weight of grafted polymer on the substrate. The observed hysteresis was interpreted in terms of the orientation and relaxation of polymer chains known as Lake-Thomas effect. 

Bar, G., Delineau, L., Hafele, A. and Whangbo, M.H., Investigation of the stiffness change in, the indentation force and the hydrophobic recovery of plasma-oxidized polydimethyl-siloxane surfaces by tapping mode atomic force microscopy. Polymer, 42(8), 3627-3632 (2001). 

LOTiTO s B, FRAGA c G (1998) (+)-Catechin prevents human plasma oxidation, Free Radical Biology and Medicine, 24, 435-41. 

Rein D, Lotito S, Holt R, Keen C, Schmitz H and Fraga C. 2000. Epicatechin in human plasma in vivo determination and effect of chocolate consumption on plasma oxidation status. J Nutr 130 2109S—2114S. 

Transport of dangerous goods (TDG), 745-6 Trauma, plasma oxidation level, 631 Triacetone triperoxide explosive, 707-8 Triacylglycerides, mass spectrometry, 689 Triarylgermyl hydroperoxide, formation, 822 Triarylphosphine, hydroperoxide determination, 679... 

Understandably, most workers who use radiolysis, photoionization, CTFS, or CTTS as the means for generation of (secondary) radical ions pay little attention to the nature of short-lived precursors of these ions. After all, the subject of interest is a secondary rather than a primary ion. This ad hoc approach is justifiable because radiolytic production is just another means of obtaining a sufficient yield of the radical ion. Quite often in such studies, the radiolysis is complemented by other techniques for radical ion generation, such as plasma oxidation, electron bombardment-matrix deposition, and chemical and electrochemical reduction or oxidation. While the data obtained in these studies are useful, there is little radiation chemistry in such—nominally, radiation chemistry—studies. 

Figure 5. IET spectrum of an undosed Al/Al-oxide/Pb tunnel junction. The oxide was formed by oxygen plasma oxidation.

Toxic hazards never seem as acute as other hazards in the ordnance industries, and the prevailing habits of cleanliness and orderliness go a long way toward their amelioration. The current emphasis on the maintenance of environmental standards have placed additional requirements on the control of effluent gas and liq process streams. The care now being exercised is evidenced by new analytical techniques for the detection of trace contaminants such as the presence of TNT and other aromatic nitrates in the soli and in the ground w (Ref 43), New techniques of detoxification have been developed using microwave plasma oxidation of aromatic compds, heavy metal compns and chemical warfare agents (Refs 65 81)... 

Plasma Oxidation of Fibers and Surface Grafting of Coatings to Wool Fibers... 

Plasma oxidation of fibers is an example of a treatment aimed at chemically modifying the surface to improve a surface property. These treatments have wide application in industry and are used to improve wettability and printability of plastics, the adhesion of materials to surfaces including tissue culture cells, and a variety of other applications (36). 

In another study a comparison of thermal, anodic and plasma oxidation layers on GaAs was made using SIMS, AES, and XPS... 

Fig. 1 SEM image of sub-micron periodicity wrinkles created by plasma oxidation of strained polydimethylsiloxane and subsequent stress release...

Bowden N, Huck WTS, Paul KE, Whitesides GM (1999) The controlled formation of ordered, sinusoidal structures by plasma oxidation of an elastomeric polymer. Appl Phys Lett 75 2557-2559... 

Segev A, Strauss BH, Witztum JL, Lau HK, Tsimikas S. Relationship of a comprehensive panel of plasma oxidized low-density lipoprotein markers to angiographic restenosis in patients undergoing percutaneous coronary intervention for stable angina. Am Heart J 2005 150 1007-1014. 

Surface modification can be achieved by 02 plasma oxidation. For instance, because of the increase in surface negative charges after oxidation, the oxidized PDMS surface supports EOF. However, because of the instability of the charge created on the polymer surface, EOF was unstable. Better stability can be achieved by immediately filling the PDMS channel with liquids, rather than letting it be exposed to air. The useful lifetime of these devices for quantitative CE analysis, which requires EOF stability, is probably 3 h [1033]. 

Protein adsorption onto intrinsically repellent materials is enhanced by a brief plasma treatment that chemically and physically alters the surface properties. Stencil-assisted plasma oxidation of inherently hydrophobic polymers (e.g., PDMS... 

---