Organometallic vapor-phase epitaxy growth precursors

Chemical beam epitaxy a process in which one or more beams of volatile metal-organic precursors is directed to the substrate surface to effect film growth Chemical vapor deposition (CVD also termed vapor phase epitaxy) the deposition of a thin film of an element or compound using some form of excitation for the decomposition of a volatile precursor Laser-assisted chemical vapor deposition a CVD in which the excitation is delivered from photons delivered from a laser Metal-organic chemical vapor deposition (MOCVD) the same as CVD, except that the precursor is a volatile organometallic or coordination compound with carbon-containing ligands... 

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