Optically controlled flow devices

R 18] [A 1] Each module is equipped with a heater (H3-H8) and a fluidic cooling (C03-C06). Temperature sensors integrated in the modules deliver the sensor signals for the heater control. Fluidic data such as flow and pressure are measured integrally outside the micro structured devices by laboratory-made flow sensors manufactured by silicon machining. The micro structured pressure sensor can tolerate up to 10 bar at 200 °C with a small dead volume of only 0.5 pi. The micro structured mass flow sensor relies on the Coriolis principle and is positioned behind the pumps in Figure 4.59 (FIC). For more detailed information about the product quality it was recommended to use optical flow cells inline with the chemical process combined with an NIR analytic or a Raman spectrometer. 

Micro flow control devices open new possibilities for the miniaturization of conventional chemical and biochemical analysis systems. The micro total analysis system (pTAS) including microfabricated detectors (e.g. silicon based chemical sensors, optical sensors), micro flow control devices and control/detec-tion circuits is a practical micro electro mechanical system (MEMS). pTAS realize very small necessary sample volume, fast response and the reduction of reagents which is very useful in chemical and medical analysis. Two approaches of monolithic and hybrid integration of these devices have been studied. Monolithic and hybrid types of flow injection analysis (FIA) systems were already demonstrated [4, 5]. The combination of the partly integrated components and discrete components is useful in many cases [6]. To fabricate such systems, bonding and assembling methods play very important roles [7]. 

The continuous operation of LCVD could be controlled, in principle, by the strict controls of the flow rate, the system pressure, and the discharge power. The addition of a residual gas analyzer in each pumping system is advantageous in detecting abnormality in gas flow, occurrence of leakage, etc. The addition of more sophisticated diagnostic devices, such as an optical emission spectrometer, in-line XPS, etc., is often counterproductive because the stability of performance and the maintenance requirement cycle of these devices do not match those for the continuous mode operation of LCVD. The information obtainable by these devices... 

In addition to reaction chambers and delivery systems, a number of supervising and sensor systems are of utmost importance for control and safety reasons. Sensors in automated workstations include measurement of temperature (thermocouple, thermistor, semiconductor), pressure, liquid flow and gas or liquid level. To monitor the presence or absence of vessels or devices, systems like capacitance, inductivity, ultrasonic monitors, magnetic sensors or optical sensors (reflective, beam interruption, color) can be integrated in automated workstations. 

There are two different ways of operating a continuous stirred-tank fermentor, namely chemostat and turbidostat. In the chemostat, the flow rate of the feed medium and the liquid volume in the fermentor are kept constant. The rate of cell growth will then adjusts itself to the substrate concentration, which depends on the feed rate and substrate consumption by the growing cells. In the turbidostat the liquid volume in the fermentor and the liquid turbidity, which varies with the cell concentration, are kept constant by adjusting the liquid flow rate. Whereas, turbidostat operation requires a device to monitor the cell concentration (e.g., an optical sensor) and a control system for the flow rate, chemostat is much simpler to operate and hence is far more commonly used for continuous fermentation. The characteristics of the continuous stirred-tank fermentor (CSTF), when operated as a chemostat, is discussed in Chapter 12. 

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